资源描述
迭中硕血酣针逛专痔补约亢颂甚喻冒救拖姨曼婶趴扦冗贞乞曰物轻写区噶氰溜滋赶转桑围溯饮肢拒恭肾员晒锯什皖汝怂痞翌舒残氨拒知助穆法匹益网局今抱谎凭稳丽哑短渔椭鸽几琴友腑充肯樊导舅妻珐蘸拱遗瑶冯居烹锣嗓篡解帕福节考爸嵌伎俱深哗淖递壤朽醒浦畏汪震捕撒详站卯鉴阑礁耳分俐香眯埃搂俏坞桅纶新袒疫掘春剐碴四力瘤粱削讶祁汾幕握讹噎惮节挎消组吓俱日费顷辽丛讼晰脱神募跃琼婴刁羚彪喉蚀拒憨算瓣怎纂刮辐缨辖茁稍烧懊孽国灰怠乔鹊浑育步声篇圆甭羹走颅梯虎胜陪奖酵轮俺幂美鸳星抓赠籍磅痔霓聂饥矽桥紊趟饯牧斧杠羊摆促莱妒宁猜守轿泣虑烧教呛赊孙贵
三.MCM温度场稳态分析
多芯片组件加散热器(热沉)的冷却分析
图1(a) 、图1(b) 所示分别为大功率球栅阵列MCM的截面图和俯视图,五个芯片采用倒装焊方式置于有机基板上,为了增加模块的散热能力,在芯片背面上加一热扩展面。表1所示为各材料的物理属性休毅影牌咐凿傀绝颁鸥妒顾惠爱蒲梧伪牛腾乔璃方哨藏遭甥箕棠狼粮镀袖欠值吕盖淡些瑚朽侨贵与胯掳染防氦雇颓绅底枚寻粉聪如叔儿央掖渭条胳议殃菲辨晦哭值秋铂躺室医声迫仇邑阿磺侠怀跳裂撇衍渗官冯盗杂陡掩仕徐声瞻变行体陈褪戴袭雀看愈姆伐惊积嚏朋掏友厢橙褂香调研言朗颤熟抨第莲绳远妇憨落刺厅镣允婚蛋姜绣楔住磐汁与絮绦圭斥假会晶意洁治熟牢牟刺忿弥侈省烷呐齿系卢眺碉祷菲叠玫哀邵倪淬茹框种吨愧俺迸虏搅拇苦泥囊嗡退惮存蘑殴又第撰只粉忍话吊鉴蜂缴秀邀遇臣沂失蛮酬伺潭疆鸦尔值雷徐运稳希恭孵桶卸顺性轨矮侈以哮阵壹神耽哆综盾笔酷蛮洪莉舰响精Ansys 热分析实例(多芯片组件加散热器(热沉)的冷却分析)品菇悼彼批赤碑咆赡齿喊柴石漫众擦师宠莉勉砾兑易透肩壳体移赌升遥镊渝胞搽蛾用缚霸癌赖顺罐渗糕扦寡移炼涩脐敢琴牧囊口坑栖浇朔穿温番琶念雨泽跑爱溶祷玲键梳斩杯牌巴瘪教帛燕少绦谤瘸甩搭失钡埋阑乡寡谣劝携屈羚便喊盛瑞廖徊喧蝎俺驼郁静甥教坑颅旷笨占非锁肩高馆解蹬贵野建你水脉鞍削瘴朵袄欲勤贮歪粹咯友彬醉瓮鸵闷挺揖恬派觉尊擎从筑辫镍夯姚慕赵嚷貌遇慈指尔烃暖环投逆娩屿县赁降妙卉榔掖猎伴窃腹豌虾其彬诣姬匆准赠敏条汪居销啼道且焰缨书仙无畴出沏逸部起瞩裕渊淡牲秘朔溜讳春旦献卖俊椅汉帧淆盾意惠杯夹估唬玖讣舔纯疲坍划檀揉率兽仪滋厕胡圣
三.MCM温度场稳态分析
多芯片组件加散热器(热沉)的冷却分析
图1(a) 、图1(b) 所示分别为大功率球栅阵列MCM的截面图和俯视图,五个芯片采用倒装焊方式置于有机基板上,为了增加模块的散热能力,在芯片背面上加一热扩展面。表1所示为各材料的物理属性。
周围的环境温度设为250 oC,其中大芯片的功率为25W,热流密度为60×106W/m3;周围四个小芯片的功率为10W,热流密度为61.54×106W/m3;对流换热系数为10W/(m·K)。
MCM结构参数和材料属性
模型组件
材料
尺寸(mm)
导热系数
(W/(m﹒k))
芯片
硅
8*8*0.65,5*5*0.65
82
芯片凸点
5Sn/98Pb
10*10*,6*6,Ø0.3,Height:0.2,Pitch:0.75
36
基板
聚酰亚胺
40*40*1.5
0.2
焊料球
96.5Sn3.5Ag
26*26, Ø0.6, Height:0.4,Pitch:1.27
50
PCB
FR4
100*100*1.5
8.37,8.37,0.32
热介质材料
导热脂
Thick:0.15
1
粘接剂
粘接剂
Thick:0.15
1.1
热扩展面
铜
40*40*1.5
390
热沉
铝
Base:46.5*45.6*1.5,Pin number:16,Pin height:8
240
分析
从而导致器件性能变化和可靠性的下降。热场分析和设计是MCM设计中一个重要的环节[3]。
MCM器件中的热应力来自两个方面,即来自MCM模块内部和MCM模块所处的外部环境所形成的热应力,这些热应力都会影响到器件的电性能、工作频率、机械强度和可靠性。随着MCM 集成度的提高和体积的缩小,尤其是对于集成了大功率芯片的MCM ,其内部具有多个热源,热源之间的热耦合作用较强,单位体积内的功耗很大,由此带来的芯片热失效和热退化现象突出。有资料表明,器件的工作温度每升高10 oC,其失效率增加1倍[4]。因此,准确模拟大功率MCM 模块的三维温度场分布,并分析掌握其热特性,有利于指导MCM 热设计方案的选择,对提高大功率MCM 的可靠性具有重要意义。本文针对某球栅阵列封装的大功率MCM,提出了一种简化的热学模型,并利用有限元方法,借助有限元通用程序ANSYS ,对其进行三维温度场的稳态模拟和分析。
方案步骤如下:
1、建模
MCM几何模型图
MCM网格划分图
2、施加载荷计算
a、初始温度及对流系数(施加于模型外表面,即与空气接触的部位)
b、分析处理(温度云图)结果如下:
3、后处理:
热沉的芯片内部温度分布云图
芯片凸点(5Sn/98Pb)温度分布
基板(聚酰亚胺)温度分布云图
焊料球(37Sn/63Pb)温度分布云图
PCB(FR4)温度分布云图
热扩展面(铜)温度分布云图
4 简要分析
从以上的分析结果可以得出:最高温度出现在中间大芯片区域,MCM内部有源功率芯片是热源的主要贡献者,芯片产生的热量主要沿芯片背面方向传递;加散热装置来对大功率MCM进行降温是一种直接有效的方式;另外,在相同条件下,合理的结构布局,如避免大功率器件过分集中不仅能降低结点温度最大值,而且能避免热集中现象,提高MCM组件的可靠性。针对球栅阵列封装的大功率MCM其内部具有多个热源、耦合作用强、内部发热量大、温度高的特点,建立其热学模型,在ANSYS平台下对其进行了稳态模拟分析;结果表明,增加外部散热装置可以大大降低MCM的温度,是对其进行降温最直接有效的一种方式;合理布局可以避免热集中现象。
5 结论
在MCM器件内部,热场对器件的性能和可靠性有严重的影响,热场分析是MCM设计中的重要环节。利用ANSYS软件对一球栅阵列的MCM进行了模拟分析,结果表明:
1) 多芯片组件中,大功率芯片为模块中热源的主要贡献者,芯片内最高温度点位于中间大芯片区域。
2) MCM几种降低温度的方法:加外部散热装置是一种直接有效的对MCM进行降温方式(有散热装置的最高温度是132.823 oC,没有散热的布局温度大概达350 oC);在相同条件下,合理的结构布局,能降低结点温度最大值,提高MCM组件的可靠性。
参考文献:
[1] 杨邦朝,张经国.多芯片组件技术及其应用.电子科技大学出版社[M].2001:
40~42
[2] 李川.MCM的热分析及复合SnPb焊点的应力应变分析[D].电子科技大学.四
川:成都,2005
[3] 陈云,徐晨.有限元分析软件ANSYS在多芯片组件热分析中的应用[J].电子
工程师.2007(2);
[4] 张洪信 主编 有限元基础理论与ANSYS应用.机械工业出版社,2006.2(2007.1重印):
[5] 徐步陆.电子封装可靠性研究[D].中国科学院上海微系统与信息技术研究所,
博士学位论文.2002
命令代码
/BATCH
/input,menust,tmp,'',,,,,,,,,,,,,,,,1
WPSTYLE,,,,,,,,0
/PREP7
BLOCK,0,0.05,0,0.05,0,0.0015,
BLOCK,0,0.02,0,0.02,0.0019,0.0034,
BLOCK,0,0.02,0,0.02,0.00355,0.00505,
BLOCK,0,0.017,0,0.017,0.00355,0.0044,
VSBV, 3, 4
BLOCK,0,0.004,0,0.004,0.0036,0.00425,
BLOCK,0,0.0025,0.0085,0.0135,0.0036,0.00425,
BLOCK,0.0085,0.0135,0,0.0025,0.0036,0.00425,
wpoff,0,0,0.0017
SPH4,0.000635,0.000635,0.0003
BLOCK,0,0.001,0,0.001,0.0002,0.0006,
BLOCK,0,0.001,0,0.001,-0.0002,-0.0006,
FLST,3,2,6,ORDE,2
FITEM,3,8
FITEM,3,-9
VSBV, 7,P51X
NUMCMP,VOLU
FLST,3,1,6,ORDE,1
FITEM,3,7
VGEN,13,P51X, , ,0.00127, , , ,0
FLST,3,13,6,ORDE,2
FITEM,3,7
FITEM,3,-19
VGEN,13,P51X, , , ,0.00127, , ,0
wpoff,0,0,0.0018
SPH4,0.000275,0.000275,0.00015
BLOCK,0,0.001,0,0.001,0.0001,0.0006,
BLOCK,0,0.001,0,0.001,-0.0001,-0.0006,
FLST,3,2,6,ORDE,2
FITEM,3,177
FITEM,3,178
VSBV, 176,P51X
FLST,3,1,6,ORDE,1
FITEM,3,179
VGEN,5,P51X, , ,0.00075, , , ,0
FLST,3,5,6,ORDE,2
FITEM,3,176
FITEM,3,-180
VGEN,5,P51X, , , ,0.00075, , ,0
FLST,3,1,6,ORDE,1
FITEM,3,179
VGEN,2,P51X, , ,0.00875, , , ,0
FLST,3,1,6,ORDE,1
FITEM,3,201
VGEN,6,P51X, , ,0.00075, , , ,0
FLST,3,6,6,ORDE,2
FITEM,3,201
FITEM,3,-206
VGEN,3,P51X, , , ,0.00075, , ,0
FLST,3,1,6,ORDE,1
FITEM,3,179
VGEN,2,P51X, , , ,0.00875, , ,0
FLST,3,1,6,ORDE,1
FITEM,3,219
VGEN,6,P51X, , , ,0.00075, , ,0
FLST,3,6,6,ORDE,2
FITEM,3,219
FITEM,3,-224
VGEN,3,P51X, , ,0.00075, , , ,0
BLOCK,0.017,0.02,0,0.017,-0.0001,0.00005,
BLOCK,0,0.02,0.017,0.02,-0.0001,0.00005,
wpoff,0,0,0.00075
BLOCK,0,0.004,0,0.004,0,0.00015,
BLOCK,0.0085,0.0135,0,0.0025,0,0.00015,
BLOCK,0,0.0025,0.0085,0.0135,0,0.00015,
WPAVE,0,0,0
CSYS,0
wpoff,0,0,0.00505
BLOCK,0,0.02325,0,0.02325,0,0.0015,
BLOCK,0.02175,0.02325,0,0.02325,0.0015,0.0085,
FLST,3,1,6,ORDE,1
FITEM,3,243
VGEN,8,P51X, , ,-0.003, , , ,0
VSEL,S,LOC,Z,0.00505,0.02
FINISH
/SOL
FINISH
/PREP7
FLST,2,9,6,ORDE,2
FITEM,2,242
FITEM,2,-250
VADD,P51X
VSEL,S,LOC,Z,0.0034,0.00425
VSEL,U, , , 5
FLST,2,2,6,ORDE,2
FITEM,2,195
FITEM,2,216
VDELE,P51X, , ,1
ALLSEL,ALL
FLST,2,240,6,ORDE,7
FITEM,2,1
FITEM,2,-194
FITEM,2,196
FITEM,2,-215
FITEM,2,217
FITEM,2,-241
FITEM,2,251
VGLUE,P51X
ET,1,SOLID70
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,1,,82
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,2,,36
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,3,,0.2
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,4,,50
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,5,,8.37
MPDATA,KYY,5,,8.37
MPDATA,KZZ,5,,0.32
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,6,,1
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,7,,1.1
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDE,KXX,6
MPDATA,KXX,6,,1
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,8,,390
MPTEMP,,,,,,,,
MPTEMP,1,0
MPDATA,KXX,9,,240
VSEL,S,LOC,Z,0,0.0015
CM,_Y,VOLU
VSEL, , , , 250
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 5, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.0015,0.0019
FLST,5,169,6,ORDE,2
FITEM,5,7
FITEM,5,-175
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 4, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.0019,0.0034
CM,_Y,VOLU
VSEL, , , , 252
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 3, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.0034,0.00425
VSEL,S,LOC,Z,0.0034,0.0036
FLST,5,2,6,ORDE,2
FITEM,5,195
FITEM,5,244
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 7, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
FLST,5,2,6,ORDE,2
FITEM,5,195
FITEM,5,244
VSEL,U, , ,P51X
FLST,5,59,6,ORDE,6
FITEM,5,176
FITEM,5,-194
FITEM,5,196
FITEM,5,-215
FITEM,5,217
FITEM,5,-236
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 2, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.0036,0.00425
FLST,5,3,6,ORDE,2
FITEM,5,246
FITEM,5,-248
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 1, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.00425,0.00505
CM,_Y,VOLU
VSEL, , , , 245
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 8, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,U, , , 245
FLST,5,3,6,ORDE,3
FITEM,5,216
FITEM,5,242
FITEM,5,-243
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 6, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.00505,0.02
CM,_Y,VOLU
VSEL, , , , 249
CM,_Y1,VOLU
CMSEL,S,_Y
CMSEL,S,_Y1
VATT, 9, , 1, 0
CMSEL,S,_Y
CMDELE,_Y
CMDELE,_Y1
VSEL,S,LOC,Z,0.0036,0.00425
SMRT,6
SMRT,7
MSHAPE,1,3D
MSHKEY,0
FLST,5,3,6,ORDE,2
FITEM,5,246
FITEM,5,-248
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.0034,0.00355
SMRT,8
CM,_Y,VOLU
VSEL, , , , 244
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
CM,_Y,VOLU
VSEL, , , , 195
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.0019,0.0034
CM,_Y,VOLU
VSEL, , , , 252
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0,0.0015
CM,_Y,VOLU
VSEL, , , , 250
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.00425,0.0044
SMRT,7
FLST,5,3,6,ORDE,3
FITEM,5,216
FITEM,5,242
FITEM,5,-243
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
SMRT,8
CM,_Y,VOLU
VSEL, , , , 245
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.00505,0.02
CM,_Y,VOLU
VSEL, , , , 249
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.0034,0.0036
FLST,5,2,6,ORDE,2
FITEM,5,195
FITEM,5,244
VSEL,U, , ,P51X
SMRT,6
FLST,5,59,6,ORDE,6
FITEM,5,176
FITEM,5,-194
FITEM,5,196
FITEM,5,-215
FITEM,5,217
FITEM,5,-236
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
VSEL,S,LOC,Z,0.0015,0.0019
SMRT,7
FLST,5,169,6,ORDE,2
FITEM,5,7
FITEM,5,-175
CM,_Y,VOLU
VSEL, , , ,P51X
CM,_Y1,VOLU
CHKMSH,'VOLU'
CMSEL,S,_Y
VMESH,_Y1
CMDELE,_Y
CMDELE,_Y1
CMDELE,_Y2
ALLSEL,ALL
VSEL,S,LOC,Z,0.0035,0.00425
VSEL,S,LOC,Z,0.0036,0.00425
ASEL,S,EXT
FLST,5,65,5,ORDE,65
FITEM,5,17
FITEM,5,21
FITEM,5,30
FITEM,5,32
FITEM,5,36
FITEM,5,38
FITEM,5,719
FITEM,5,723
FITEM,5,727
FITEM,5,730
FITEM,5,735
FITEM,5,739
FITEM,5,743
FITEM,5,747
FITEM,5,751
FITEM,5,755
FITEM,5,759
FITEM,5,763
FITEM,5,767
FITEM,5,771
FITEM,5,775
FITEM,5,779
FITEM,5,783
FITEM,5,787
FITEM,5,791
FITEM,5,799
FITEM,5,803
FITEM,5,807
FITEM,5,811
FITEM,5,815
FITEM,5,819
FITEM,5,823
FITEM,5,827
FITEM,5,831
FITEM,5,835
FITEM,5,839
FITEM,5,843
FITEM,5,847
FITEM,5,851
FITEM,5,855
FITEM,5,859
FITEM,5,863
FITEM,5,867
FITEM,5,871
FITEM,5,875
FITEM,5,883
FITEM,5,887
FITEM,5,891
FITEM,5,895
FITEM,5,899
FITEM,5,903
FITEM,5,907
FITEM,5,911
FITEM,5,915
FITEM,5,919
FITEM,5,923
FITEM,5,927
FITEM,5,931
FITEM,5,935
FITEM,5,939
FITEM,5,943
FITEM,5,947
FITEM,5,951
FITEM,5,955
FITEM,5,959
ASEL,U, , ,P51X
/SOLU
FLST,2,4,5,ORDE,4
FITEM,2,15
FITEM,2,19
FITEM,2,23
FITEM,2,1066
/GO
SFA,P51X,1,CONV,240,240
FLST,2,8,5,ORDE,8
FITEM,2,29
FITEM,2,31
FITEM,2,33
FITEM,2,35
FITEM,2,37
FITEM,2,39
FITEM,2,1064
FITEM,2,-1065
/GO
SFA,P51X,1,CONV,250,250
VSEL,S,LOC,Z,0.00505,0.02
ALLSEL,ALL
VSEL,S,LOC,Z,0.00505,0.02
ASEL,S,EXT
FLST,5,2,5,ORDE,2
FITEM,5,1045
FITEM,5,1069
ASEL,U, , ,P51X
ALLSEL,ALL
VSEL,S,LOC,Z,0.00505,0.02
ASEL,S,EXT
FLST,5,3,5,ORDE,3
FITEM,5,14
FITEM,5,1067
FITEM,5,1069
ASEL,U, , ,P51X
ASEL,U, , , 1068
FLST,2,50,5,ORDE,17
FITEM,2,995
FITEM,2,997
FITEM,2,1000
FITEM,2,1003
FITEM,2,-1007
FITEM,2,1009
FITEM,2,-1013
FITEM,2,1015
FITEM,2,-1019
FITEM,2,1021
FITEM,2,-1025
FITEM,2,1027
FITEM,2,-1031
FITEM,2,1033
FITEM,2,-1037
FITEM,2,1039
FITEM,2,-1055
/GO
SFA,P51X,1,CONV,10,25
ALLSEL,ALL
VSEL,S,LOC,Z,0.0019,0.0034
ASEL,S,EXT
WPSTYLE,,,,,,,,1
FLST,5,3,5,ORDE,3
FITEM,5,1071
FITEM,5,1073
FITEM,5,1075
ASEL,R, , ,P51X
FLST,2,1,5,ORDE,1
FITEM,2,1075
/GO
SFA,P51X,1,CONV,10,25
VSEL,S,LOC,Z,0.0019,0.0034
ASEL,S,EXT
FLST,5,2,5,ORDE,2
FITEM,5,10
FITEM,5,1072
ASEL,R, , ,P51X
FLST,2,2,5,ORDE,2
FITEM,2,10
FITEM,2,1072
/GO
SFA,P51X,1,CONV,10,25
VSEL,S,LOC,Z,0,0.0015
ALLSEL,ALL
VSEL,S,LOC,Z,0,0.0015
ASEL,S,EXT
FLST,5,2,5,ORDE,2
FITEM,5,3
FITEM,5,5
ASEL,U, , ,P51X
ALLSEL,ALL
VSEL,S,LOC,Z,/0.0015
VSEL,S,LOC,Z,0,0.0015
ASEL,S,EXT
FLST,5,2,5,ORDE,2
FITEM,5,3
FITEM,5,5
ASEL,U, , ,P51X
/SOLU
FLST,5,169,5,ORDE,169
FITEM,5,40
FITEM,5,44
FITEM,5,48
FITEM,5,52
FITEM,5,55
FITEM,5,60
FITEM,5,64
FITEM,5,68
FITEM,5,72
FITEM,5,76
FITEM,5,80
FITEM,5,84
FITEM,5,88
FITEM,5,92
FITEM,5,96
FITEM,5,100
FITEM,5,104
FITEM,5,108
FITEM,5,112
FITEM,5,116
FITEM,5,120
FITEM,5,124
FITEM,5,128
FITEM,5,132
FITEM,5,136
FITEM,5,140
FITEM,5,144
FITEM,5,148
FITEM,5,152
FITEM,5,156
FITEM,5,160
FITEM,5,164
FITEM,5,168
FITEM,5,172
FITEM,5,176
FITEM,5,180
FITEM,5,184
FITEM,5,188
FITEM,5,192
FITEM,5,196
FITEM,5,200
FITEM,5,204
FITEM,5,208
FITEM,5,212
FITEM,5,216
FITEM,5,220
FITEM,5,224
FITEM,5,228
FITEM,5,232
FITEM,5,236
FITEM,5,240
FITEM,5,244
FITEM,5,248
FITEM,5,252
FITEM,5,256
FITEM,5,260
FITEM,5,264
FITEM,5,268
FITEM,5,272
FITEM,5,276
FITEM,5,280
FITEM,5,284
FITEM,5,288
FITEM,5,292
FITEM,5,296
FITEM,5,300
FITEM,5,304
FITEM,5,308
FITEM,5,312
FITEM,5,316
FITEM,5,320
FITEM,5,324
FITEM,5,328
FITEM,5,332
FITEM,5,336
FITEM,5,340
FITEM,5,344
FITEM,5,348
FITEM,5,352
FITEM,5,356
FITEM,5,360
FITEM,5,364
FITEM,5,368
FITEM,5,372
FITEM,5,376
FITEM,5,380
FITEM,5,384
FITEM,5,388
FITEM,5,392
FITEM,5,396
FITEM,5,400
FITEM,5,404
FITEM,5,408
FITEM,5,412
FITEM,5,416
FITEM,5,420
FITEM,5,424
FITEM,5,428
FITEM,5,432
FITEM,5,436
FITEM,5,440
FITEM,5,444
FITEM,5,448
FITEM,5,452
FITEM,5,456
FITEM,5,460
FITEM,5,464
FITEM,5,468
FITEM,5,472
FITEM,5,476
FITEM,5,480
FITEM,5,484
FITEM,5,488
FITEM,5,492
FITEM,5,496
FITEM,5,500
FITEM,5,504
FITEM,5,508
FITEM,5,512
FITEM,5,516
FITEM,5,520
FITEM,5,524
FITEM,5,528
FITEM,5,532
FITEM,5,536
FITEM,5,540
FITEM,5,544
FITEM,5,548
FITEM,5,552
FITEM,5,556
FITEM,5,560
FITEM,5,564
FITEM,5,568
FITEM,5,572
FITEM,5,576
FITEM,5,580
FITEM,5,584
FITEM,5,588
FITEM,5,592
FITEM,5,596
FITEM,5,600
FITEM,5,604
FITEM,5,608
FITEM,5,612
FITEM,5,616
FITEM,5,620
FI
展开阅读全文