1、迭中硕血酣针逛专痔补约亢颂甚喻冒救拖姨曼婶趴扦冗贞乞曰物轻写区噶氰溜滋赶转桑围溯饮肢拒恭肾员晒锯什皖汝怂痞翌舒残氨拒知助穆法匹益网局今抱谎凭稳丽哑短渔椭鸽几琴友腑充肯樊导舅妻珐蘸拱遗瑶冯居烹锣嗓篡解帕福节考爸嵌伎俱深哗淖递壤朽醒浦畏汪震捕撒详站卯鉴阑礁耳分俐香眯埃搂俏坞桅纶新袒疫掘春剐碴四力瘤粱削讶祁汾幕握讹噎惮节挎消组吓俱日费顷辽丛讼晰脱神募跃琼婴刁羚彪喉蚀拒憨算瓣怎纂刮辐缨辖茁稍烧懊孽国灰怠乔鹊浑育步声篇圆甭羹走颅梯虎胜陪奖酵轮俺幂美鸳星抓赠籍磅痔霓聂饥矽桥紊趟饯牧斧杠羊摆促莱妒宁猜守轿泣虑烧教呛赊孙贵 三.MCM温度场稳态分析 多芯片组件加散热器(热沉)的冷却分析
2、 图1(a) 、图1(b) 所示分别为大功率球栅阵列MCM的截面图和俯视图,五个芯片采用倒装焊方式置于有机基板上,为了增加模块的散热能力,在芯片背面上加一热扩展面。表1所示为各材料的物理属性休毅影牌咐凿傀绝颁鸥妒顾惠爱蒲梧伪牛腾乔璃方哨藏遭甥箕棠狼粮镀袖欠值吕盖淡些瑚朽侨贵与胯掳染防氦雇颓绅底枚寻粉聪如叔儿央掖渭条胳议殃菲辨晦哭值秋铂躺室医声迫仇邑阿磺侠怀跳裂撇衍渗官冯盗杂陡掩仕徐声瞻变行体陈褪戴袭雀看愈姆伐惊积嚏朋掏友厢橙褂香调研言朗颤熟抨第莲绳远妇憨落刺厅镣允婚蛋姜绣楔住磐汁与絮绦圭斥假会晶意洁治熟牢牟刺忿弥侈省烷呐齿系卢眺碉祷菲叠玫哀邵倪淬茹框种吨愧俺迸虏搅拇苦泥囊嗡退惮存蘑殴又第
3、撰只粉忍话吊鉴蜂缴秀邀遇臣沂失蛮酬伺潭疆鸦尔值雷徐运稳希恭孵桶卸顺性轨矮侈以哮阵壹神耽哆综盾笔酷蛮洪莉舰响精Ansys 热分析实例(多芯片组件加散热器(热沉)的冷却分析)品菇悼彼批赤碑咆赡齿喊柴石漫众擦师宠莉勉砾兑易透肩壳体移赌升遥镊渝胞搽蛾用缚霸癌赖顺罐渗糕扦寡移炼涩脐敢琴牧囊口坑栖浇朔穿温番琶念雨泽跑爱溶祷玲键梳斩杯牌巴瘪教帛燕少绦谤瘸甩搭失钡埋阑乡寡谣劝携屈羚便喊盛瑞廖徊喧蝎俺驼郁静甥教坑颅旷笨占非锁肩高馆解蹬贵野建你水脉鞍削瘴朵袄欲勤贮歪粹咯友彬醉瓮鸵闷挺揖恬派觉尊擎从筑辫镍夯姚慕赵嚷貌遇慈指尔烃暖环投逆娩屿县赁降妙卉榔掖猎伴窃腹豌虾其彬诣姬匆准赠敏条汪居销啼道且焰缨书仙无畴出沏逸部起
4、瞩裕渊淡牲秘朔溜讳春旦献卖俊椅汉帧淆盾意惠杯夹估唬玖讣舔纯疲坍划檀揉率兽仪滋厕胡圣 三.MCM温度场稳态分析 多芯片组件加散热器(热沉)的冷却分析 图1(a) 、图1(b) 所示分别为大功率球栅阵列MCM的截面图和俯视图,五个芯片采用倒装焊方式置于有机基板上,为了增加模块的散热能力,在芯片背面上加一热扩展面。表1所示为各材料的物理属性。 周围的环境温度设为250 oC,其中大芯片的功率为25W,热流密度为60×106W/m3;周围四个小芯片的功率为10W,热流密度为61.54×106W/m3;对流换热系数为10W/(m·K)。 MCM结构参数和材料属性 模型组件 材料
5、尺寸(mm) 导热系数 (W/(m﹒k)) 芯片 硅 8*8*0.65,5*5*0.65 82 芯片凸点 5Sn/98Pb 10*10*,6*6,Ø0.3,Height:0.2,Pitch:0.75 36 基板 聚酰亚胺 40*40*1.5 0.2 焊料球 96.5Sn3.5Ag 26*26, Ø0.6, Height:0.4,Pitch:1.27 50 PCB FR4 100*100*1.5 8.37,8.37,0.32 热介质材料 导热脂 Thick:0.15 1 粘接剂 粘接剂 Thick:0.15 1.1 热扩展面 铜
6、40*40*1.5 390 热沉 铝 Base:46.5*45.6*1.5,Pin number:16,Pin height:8 240 分析 从而导致器件性能变化和可靠性的下降。热场分析和设计是MCM设计中一个重要的环节[3]。 MCM器件中的热应力来自两个方面,即来自MCM模块内部和MCM模块所处的外部环境所形成的热应力,这些热应力都会影响到器件的电性能、工作频率、机械强度和可靠性。随着MCM 集成度的提高和体积的缩小,尤其是对于集成了大功率芯片的MCM ,其内部具有多个热源,热源之间的热耦合作用较强,单位体积内的功耗很大,由此带来的芯片热失效和热退化现象突出。有资料表
7、明,器件的工作温度每升高10 oC,其失效率增加1倍[4]。因此,准确模拟大功率MCM 模块的三维温度场分布,并分析掌握其热特性,有利于指导MCM 热设计方案的选择,对提高大功率MCM 的可靠性具有重要意义。本文针对某球栅阵列封装的大功率MCM,提出了一种简化的热学模型,并利用有限元方法,借助有限元通用程序ANSYS ,对其进行三维温度场的稳态模拟和分析。 方案步骤如下: 1、建模 MCM几何模型图 MCM网格划分图 2、施加载荷计算 a、初始温度及对流系数(施加于模型外表面,即
8、与空气接触的部位) b、分析处理(温度云图)结果如下: 3、后处理: 热沉的芯片内部温度分布云图 芯片凸点(5Sn/98Pb)温度分布 基板(聚酰亚胺)温度分布云图 焊料球(37Sn/63Pb)温度分布云图 PCB(FR4)温度分布云图 热扩展面(铜)温度分布云图 4 简要分析 从以上的分析结果可以得出:最高温度出现在中间大芯片区域,MCM内部有源功率芯片是热源的主要贡献者,芯片产生的热量主要沿芯片背面方向传递;加散热装置来对大功率MCM进行降温
9、是一种直接有效的方式;另外,在相同条件下,合理的结构布局,如避免大功率器件过分集中不仅能降低结点温度最大值,而且能避免热集中现象,提高MCM组件的可靠性。针对球栅阵列封装的大功率MCM其内部具有多个热源、耦合作用强、内部发热量大、温度高的特点,建立其热学模型,在ANSYS平台下对其进行了稳态模拟分析;结果表明,增加外部散热装置可以大大降低MCM的温度,是对其进行降温最直接有效的一种方式;合理布局可以避免热集中现象。 5 结论 在MCM器件内部,热场对器件的性能和可靠性有严重的影响,热场分析是MCM设计中的重要环节。利用ANSYS软件对一球栅阵列的MCM进行了模拟分析,结果表明: 1)
10、 多芯片组件中,大功率芯片为模块中热源的主要贡献者,芯片内最高温度点位于中间大芯片区域。 2) MCM几种降低温度的方法:加外部散热装置是一种直接有效的对MCM进行降温方式(有散热装置的最高温度是132.823 oC,没有散热的布局温度大概达350 oC);在相同条件下,合理的结构布局,能降低结点温度最大值,提高MCM组件的可靠性。 参考文献: [1] 杨邦朝,张经国.多芯片组件技术及其应用.电子科技大学出版社[M].2001: 40~42 [2] 李川.MCM的热分析及复合SnPb焊点的应力应变分析[D].电子科技大学.四 川:成都,2005 [3] 陈
11、云,徐晨.有限元分析软件ANSYS在多芯片组件热分析中的应用[J].电子 工程师.2007(2); [4] 张洪信 主编 有限元基础理论与ANSYS应用.机械工业出版社,2006.2(2007.1重印): [5] 徐步陆.电子封装可靠性研究[D].中国科学院上海微系统与信息技术研究所, 博士学位论文.2002 命令代码 /BATCH /input,menust,tmp,'',,,,,,,,,,,,,,,,1 WPSTYLE,,,,,,,,0 /PREP7 BLOCK,0,0.05,0,0.05,0,0.0015, BLOC
12、K,0,0.02,0,0.02,0.0019,0.0034, BLOCK,0,0.02,0,0.02,0.00355,0.00505, BLOCK,0,0.017,0,0.017,0.00355,0.0044, VSBV, 3, 4 BLOCK,0,0.004,0,0.004,0.0036,0.00425, BLOCK,0,0.0025,0.0085,0.0135,0.0036,0.00425, BLOCK,0.0085,0.0135,0,0.0025,0.0036,0.00425, wpoff,0,0,0.0017 SPH4,0.0
13、00635,0.000635,0.0003 BLOCK,0,0.001,0,0.001,0.0002,0.0006, BLOCK,0,0.001,0,0.001,-0.0002,-0.0006, FLST,3,2,6,ORDE,2 FITEM,3,8 FITEM,3,-9 VSBV, 7,P51X NUMCMP,VOLU FLST,3,1,6,ORDE,1 FITEM,3,7 VGEN,13,P51X, , ,0.00127, , , ,0 FLST,3,13,6,ORDE,2 FITEM,3,7 FI
14、TEM,3,-19 VGEN,13,P51X, , , ,0.00127, , ,0 wpoff,0,0,0.0018 SPH4,0.000275,0.000275,0.00015 BLOCK,0,0.001,0,0.001,0.0001,0.0006, BLOCK,0,0.001,0,0.001,-0.0001,-0.0006, FLST,3,2,6,ORDE,2 FITEM,3,177 FITEM,3,178 VSBV, 176,P51X FLST,3,1,6,ORDE,1 FITEM,3,179 VGEN,5,P51X, ,
15、 ,0.00075, , , ,0 FLST,3,5,6,ORDE,2 FITEM,3,176 FITEM,3,-180 VGEN,5,P51X, , , ,0.00075, , ,0 FLST,3,1,6,ORDE,1 FITEM,3,179 VGEN,2,P51X, , ,0.00875, , , ,0 FLST,3,1,6,ORDE,1 FITEM,3,201 VGEN,6,P51X, , ,0.00075, , , ,0 FLST,3,6,6,ORDE,2 FITEM,3,201 FITEM,3,-206 VGEN,3
16、P51X, , , ,0.00075, , ,0 FLST,3,1,6,ORDE,1 FITEM,3,179 VGEN,2,P51X, , , ,0.00875, , ,0 FLST,3,1,6,ORDE,1 FITEM,3,219 VGEN,6,P51X, , , ,0.00075, , ,0 FLST,3,6,6,ORDE,2 FITEM,3,219 FITEM,3,-224 VGEN,3,P51X, , ,0.00075, , , ,0 BLOCK,0.017,0.02,0,0.017,-0.0001,0.00005, BL
17、OCK,0,0.02,0.017,0.02,-0.0001,0.00005, wpoff,0,0,0.00075 BLOCK,0,0.004,0,0.004,0,0.00015, BLOCK,0.0085,0.0135,0,0.0025,0,0.00015, BLOCK,0,0.0025,0.0085,0.0135,0,0.00015, WPAVE,0,0,0 CSYS,0 wpoff,0,0,0.00505 BLOCK,0,0.02325,0,0.02325,0,0.0015, BLOCK,0.02175,0.02325,0,0.02325,0.00
18、15,0.0085, FLST,3,1,6,ORDE,1 FITEM,3,243 VGEN,8,P51X, , ,-0.003, , , ,0 VSEL,S,LOC,Z,0.00505,0.02 FINISH /SOL FINISH /PREP7 FLST,2,9,6,ORDE,2 FITEM,2,242 FITEM,2,-250 VADD,P51X VSEL,S,LOC,Z,0.0034,0.00425 VSEL,U, , , 5 FLST,2,2,6,ORDE,2 FITEM,2,19
19、5 FITEM,2,216 VDELE,P51X, , ,1 ALLSEL,ALL FLST,2,240,6,ORDE,7 FITEM,2,1 FITEM,2,-194 FITEM,2,196 FITEM,2,-215 FITEM,2,217 FITEM,2,-241 FITEM,2,251 VGLUE,P51X ET,1,SOLID70 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,1,,82 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,2,,36 MP
20、TEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,3,,0.2 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,4,,50 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,5,,8.37 MPDATA,KYY,5,,8.37 MPDATA,KZZ,5,,0.32 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,6,,1 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,7,,1.1
21、 MPTEMP,,,,,,,, MPTEMP,1,0 MPDE,KXX,6 MPDATA,KXX,6,,1 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,8,,390 MPTEMP,,,,,,,, MPTEMP,1,0 MPDATA,KXX,9,,240 VSEL,S,LOC,Z,0,0.0015 CM,_Y,VOLU VSEL, , , , 250 CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 5, , 1
22、 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.0015,0.0019 FLST,5,169,6,ORDE,2 FITEM,5,7 FITEM,5,-175 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 4, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0
23、0019,0.0034 CM,_Y,VOLU VSEL, , , , 252 CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 3, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.0034,0.00425 VSEL,S,LOC,Z,0.0034,0.0036 FLST,5,2,6,ORDE,2 FITEM,5,195 FITEM,5,244 CM,_Y,VOLU VSEL,
24、 , ,P51X CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 7, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 FLST,5,2,6,ORDE,2 FITEM,5,195 FITEM,5,244 VSEL,U, , ,P51X FLST,5,59,6,ORDE,6 FITEM,5,176 FITEM,5,-194 FITEM,5,196 FITEM,5,-215 FITEM,5,217 FITEM,5,-2
25、36 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 2, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.0036,0.00425 FLST,5,3,6,ORDE,2 FITEM,5,246 FITEM,5,-248 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CMSEL,S,_Y CMSEL,
26、S,_Y1 VATT, 1, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.00425,0.00505 CM,_Y,VOLU VSEL, , , , 245 CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 8, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,U, , , 245 FLST,5,3,6
27、ORDE,3 FITEM,5,216 FITEM,5,242 FITEM,5,-243 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CMSEL,S,_Y CMSEL,S,_Y1 VATT, 6, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.00505,0.02 CM,_Y,VOLU VSEL, , , , 249 CM,_Y1,VOLU CMSEL,S,_Y CM
28、SEL,S,_Y1 VATT, 9, , 1, 0 CMSEL,S,_Y CMDELE,_Y CMDELE,_Y1 VSEL,S,LOC,Z,0.0036,0.00425 SMRT,6 SMRT,7 MSHAPE,1,3D MSHKEY,0 FLST,5,3,6,ORDE,2 FITEM,5,246 FITEM,5,-248 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1
29、 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.0034,0.00355 SMRT,8 CM,_Y,VOLU VSEL, , , , 244 CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 CM,_Y,VOLU VSEL, , , , 195 CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,
30、Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.0019,0.0034 CM,_Y,VOLU VSEL, , , , 252 CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0,0.0015 CM,_Y,VOLU VSEL, , , , 250 CM,_Y1,V
31、OLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.00425,0.0044 SMRT,7 FLST,5,3,6,ORDE,3 FITEM,5,216 FITEM,5,242 FITEM,5,-243 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y
32、 CMDELE,_Y1 CMDELE,_Y2 SMRT,8 CM,_Y,VOLU VSEL, , , , 245 CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.00505,0.02 CM,_Y,VOLU VSEL, , , , 249 CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y
33、1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.0034,0.0036 FLST,5,2,6,ORDE,2 FITEM,5,195 FITEM,5,244 VSEL,U, , ,P51X SMRT,6 FLST,5,59,6,ORDE,6 FITEM,5,176 FITEM,5,-194 FITEM,5,196 FITEM,5,-215 FITEM,5,217 FITEM,5,-236 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1
34、VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_Y1 CMDELE,_Y2 VSEL,S,LOC,Z,0.0015,0.0019 SMRT,7 FLST,5,169,6,ORDE,2 FITEM,5,7 FITEM,5,-175 CM,_Y,VOLU VSEL, , , ,P51X CM,_Y1,VOLU CHKMSH,'VOLU' CMSEL,S,_Y VMESH,_Y1 CMDELE,_Y CMDELE,_
35、Y1 CMDELE,_Y2 ALLSEL,ALL VSEL,S,LOC,Z,0.0035,0.00425 VSEL,S,LOC,Z,0.0036,0.00425 ASEL,S,EXT FLST,5,65,5,ORDE,65 FITEM,5,17 FITEM,5,21 FITEM,5,30 FITEM,5,32 FITEM,5,36 FITEM,5,38 FITEM,5,719 FITEM,5,723 FITEM,5,727 FITEM,5,730 FITEM,5,735 FITEM,5,739 F
36、ITEM,5,743 FITEM,5,747 FITEM,5,751 FITEM,5,755 FITEM,5,759 FITEM,5,763 FITEM,5,767 FITEM,5,771 FITEM,5,775 FITEM,5,779 FITEM,5,783 FITEM,5,787 FITEM,5,791 FITEM,5,799 FITEM,5,803 FITEM,5,807 FITEM,5,811 FITEM,5,815 FITEM,5,819 FITEM,5,823 FITEM,5,827 FITEM,5
37、831 FITEM,5,835 FITEM,5,839 FITEM,5,843 FITEM,5,847 FITEM,5,851 FITEM,5,855 FITEM,5,859 FITEM,5,863 FITEM,5,867 FITEM,5,871 FITEM,5,875 FITEM,5,883 FITEM,5,887 FITEM,5,891 FITEM,5,895 FITEM,5,899 FITEM,5,903 FITEM,5,907 FITEM,5,911 FITEM,5,915 FITEM,5,919
38、 FITEM,5,923 FITEM,5,927 FITEM,5,931 FITEM,5,935 FITEM,5,939 FITEM,5,943 FITEM,5,947 FITEM,5,951 FITEM,5,955 FITEM,5,959 ASEL,U, , ,P51X /SOLU FLST,2,4,5,ORDE,4 FITEM,2,15 FITEM,2,19 FITEM,2,23 FITEM,2,1066 /GO SFA,P51X,1,CONV,240,240 FLST,2,8,5,ORDE,8
39、 FITEM,2,29 FITEM,2,31 FITEM,2,33 FITEM,2,35 FITEM,2,37 FITEM,2,39 FITEM,2,1064 FITEM,2,-1065 /GO SFA,P51X,1,CONV,250,250 VSEL,S,LOC,Z,0.00505,0.02 ALLSEL,ALL VSEL,S,LOC,Z,0.00505,0.02 ASEL,S,EXT FLST,5,2,5,ORDE,2 FITEM,5,1045 FITEM,5,1069 ASEL,U,
40、 ,P51X ALLSEL,ALL VSEL,S,LOC,Z,0.00505,0.02 ASEL,S,EXT FLST,5,3,5,ORDE,3 FITEM,5,14 FITEM,5,1067 FITEM,5,1069 ASEL,U, , ,P51X ASEL,U, , , 1068 FLST,2,50,5,ORDE,17 FITEM,2,995 FITEM,2,997 FITEM,2,1000 FITEM,2,1003 FITEM,2,-1007 FITEM,2,1009 FITEM,2,-10
41、13 FITEM,2,1015 FITEM,2,-1019 FITEM,2,1021 FITEM,2,-1025 FITEM,2,1027 FITEM,2,-1031 FITEM,2,1033 FITEM,2,-1037 FITEM,2,1039 FITEM,2,-1055 /GO SFA,P51X,1,CONV,10,25 ALLSEL,ALL VSEL,S,LOC,Z,0.0019,0.0034 ASEL,S,EXT WPSTYLE,,,,,,,,1 FLST,5,3,5,ORDE,3 F
42、ITEM,5,1071 FITEM,5,1073 FITEM,5,1075 ASEL,R, , ,P51X FLST,2,1,5,ORDE,1 FITEM,2,1075 /GO SFA,P51X,1,CONV,10,25 VSEL,S,LOC,Z,0.0019,0.0034 ASEL,S,EXT FLST,5,2,5,ORDE,2 FITEM,5,10 FITEM,5,1072 ASEL,R, , ,P51X FLST,2,2,5,ORDE,2 FITEM,2,10 FITEM,2,1072 /GO SFA,
43、P51X,1,CONV,10,25 VSEL,S,LOC,Z,0,0.0015 ALLSEL,ALL VSEL,S,LOC,Z,0,0.0015 ASEL,S,EXT FLST,5,2,5,ORDE,2 FITEM,5,3 FITEM,5,5 ASEL,U, , ,P51X ALLSEL,ALL VSEL,S,LOC,Z,/0.0015 VSEL,S,LOC,Z,0,0.0015 ASEL,S,EXT FLST,5,2,5,ORDE,2 FITEM,5,3 FITEM,5,5
44、ASEL,U, , ,P51X /SOLU FLST,5,169,5,ORDE,169 FITEM,5,40 FITEM,5,44 FITEM,5,48 FITEM,5,52 FITEM,5,55 FITEM,5,60 FITEM,5,64 FITEM,5,68 FITEM,5,72 FITEM,5,76 FITEM,5,80 FITEM,5,84 FITEM,5,88 FITEM,5,92 FITEM,5,96 FITEM,5,100 FITEM,5,104 FITEM,5,
45、108 FITEM,5,112 FITEM,5,116 FITEM,5,120 FITEM,5,124 FITEM,5,128 FITEM,5,132 FITEM,5,136 FITEM,5,140 FITEM,5,144 FITEM,5,148 FITEM,5,152 FITEM,5,156 FITEM,5,160 FITEM,5,164 FITEM,5,168 FITEM,5,172 FITEM,5,176 FITEM,5,180 FITEM,5,184 FITEM,5,188 FITEM,5,192
46、FITEM,5,196 FITEM,5,200 FITEM,5,204 FITEM,5,208 FITEM,5,212 FITEM,5,216 FITEM,5,220 FITEM,5,224 FITEM,5,228 FITEM,5,232 FITEM,5,236 FITEM,5,240 FITEM,5,244 FITEM,5,248 FITEM,5,252 FITEM,5,256 FITEM,5,260 FITEM,5,264 FITEM,5,268 FITEM,5,272 FITEM,5,276 FITEM,
47、5,280 FITEM,5,284 FITEM,5,288 FITEM,5,292 FITEM,5,296 FITEM,5,300 FITEM,5,304 FITEM,5,308 FITEM,5,312 FITEM,5,316 FITEM,5,320 FITEM,5,324 FITEM,5,328 FITEM,5,332 FITEM,5,336 FITEM,5,340 FITEM,5,344 FITEM,5,348 FITEM,5,352 FITEM,5,356 FITEM,5,360 FITEM,5,364
48、 FITEM,5,368 FITEM,5,372 FITEM,5,376 FITEM,5,380 FITEM,5,384 FITEM,5,388 FITEM,5,392 FITEM,5,396 FITEM,5,400 FITEM,5,404 FITEM,5,408 FITEM,5,412 FITEM,5,416 FITEM,5,420 FITEM,5,424 FITEM,5,428 FITEM,5,432 FITEM,5,436 FITEM,5,440 FITEM,5,444 FITEM,5,448 FITE
49、M,5,452 FITEM,5,456 FITEM,5,460 FITEM,5,464 FITEM,5,468 FITEM,5,472 FITEM,5,476 FITEM,5,480 FITEM,5,484 FITEM,5,488 FITEM,5,492 FITEM,5,496 FITEM,5,500 FITEM,5,504 FITEM,5,508 FITEM,5,512 FITEM,5,516 FITEM,5,520 FITEM,5,524 FITEM,5,528 FITEM,5,532 FITEM,5,53
50、6 FITEM,5,540 FITEM,5,544 FITEM,5,548 FITEM,5,552 FITEM,5,556 FITEM,5,560 FITEM,5,564 FITEM,5,568 FITEM,5,572 FITEM,5,576 FITEM,5,580 FITEM,5,584 FITEM,5,588 FITEM,5,592 FITEM,5,596 FITEM,5,600 FITEM,5,604 FITEM,5,608 FITEM,5,612 FITEM,5,616 FITEM,5,620 FI






