非接触式台阶仪.pptx

Non-Contact Depth Measuring Microscope System DH2/IMHProductSummaryHigh-precisionnon-contactdepthmeasurementispossiblewithobservingthesurfaceofHigh-precisionnon-contactdepthmeasurementispossiblewithobservingthesurfaceofmeasuringpoint,byverysimpleoperation,withoutpersonalequations.measuringpoint,byverysimpleoperation,withoutpersonalequations.*Hisometisanon-contactdepthmeasuringmicroscopesystem.*Designedbasedonanopticaltypefocalpointdetectionsystem.*Adoptingprecisefocusindicator,itspossibletomeasureheight,depth,steps,etc.withobservingthesurfaceofmeasuringpoint,bysimplycoincidingthehalvesofanindexgraticule(TargetMark).*Sincethereisnoconcernforphysicaldamagessuchasdistortion,blowornickstoaspecimenbecauseofnon-contactsystem,HisometisoptimumformeasuringelectroniccomponentssuchasICsorhigh-precisionprocessingparts.Page1PrincipleofmeasurementThismicroscopesystemoffersaprecisefocusindicatorconsistingofanindexgraticule(TargetMark)andabeamsplittingprismbuiltintoreflectingilluminationopticalsystemofmicroscope.Andithasbeendesignedbasedontheopticalprinciplethatatjustfocusstatus,ofwhichtheupperandlowerhalvescoincide,canbeobservedabovethefocusedimageofaspecimen,andthatwhendefocusedevenslightly,theindexlineissplitintotwolinesintheupperandlowerhalvesofthegraticule.Page2Non-Contact Depth Measuring Microscope System DH2/IMHPrincipleofmeasurementPage3Non-Contact Depth Measuring Microscope System DH2/IMH*UnderDefocusedcondition,horizontalcenterlineofTargetMarksplitsintotwolinesintheupperandlowerhalves.*UnderJustfocuscondition,theupperandlowerhalvesofTargetMarkcoincide.Humaneyesabilitytodistinguish2pointsPage4Non-Contact Depth Measuring Microscope System DH2/IMHThis chart and mathematical formula mention how accurate human eyes ability todistinguish2pointsis.Humaneyesabilitytodistinguish2linesPage5Non-Contact Depth Measuring Microscope System DH2/IMHThis chart and mathematical formula mention how accurate human eyes ability todistinguishdiscrepancybetween2linesis.Thechartandmathematicalformulashowthatdistinguishing2linesisapprox.3timessensitivethandistinguishing2points,becauseofhumaneyesstructure.MethodofmeasurementPage6*AnexactfocalpointissecuredbyconfirmingthattheverticalindexlinesintheupperandlowerhalvesofTargetMarkcoincidewithstraightlinesexactly,ratherthanbymakingjudgementsastowhetherimageofaspecimensurfaceisblurredornot.*Sincethisisauniquesystemthatisneitheraffectedbythefocaldepthofobjectivelensesnordependentontheabilityofthehumaneyestodistinguishtwopoints,afocalpointcanbedeterminedveryaccuratelyascomparedwithotherfocusingsystems.*Thisfocusingsystemandthedigitalgaugeallownon-contact,highprecisionmeasurementsofstepheightsbetweensurfaces.Non-Contact Depth Measuring Microscope System DH2/IMHPage7Non-Contact Depth Measuring Microscope System DH2/IMHUsingaspecimenhavingstepsonit,letsmeasuretheheightofdifferencebetweenH1pointandH2point.AtH1point,aftergettingjustfocusconditionbycoincidingupperandlowerTargetMark,thentravelastagehorizontallytoH2point,thencoincidelowerandupperTargetMarkagaintogetjustfocusconditionatH2point.Z-axisindicatorreadstheheightofH2point,whichmeansthedifferenceofheightbetweenH1&H2.ActualmeasurementActualmeasurementPage8Non-Contact Depth Measuring Microscope System DH2/IMHActually,Z-axisindicatorreadsthetraveledheightofmainbodyofmicroscopeitselffromH1pointtoH2.Therefore,resetthevalueofZ-axisindicatorzerowhengettingjustfocusconditionatH1point,thentravelingtoH2pointtogetjustfocusconditionagain.Z-axisindicatorreadsthevaluehowmuchitmovedvertically,whichmeansthedifferencebetweenH1&H2.FeaturesPage9Asafocalpointisdetectedunderthenon-contactopticalmethod,measurementscanbetakenwithoutbeingaffectedbyphysicaldamagestoaspecimensuchasdistortion,blowornicks,etc.Incaseofcontactsystem,sincethepointcontactedissaggedifaspecimenissoft,accuratemeasurementisdifficult.Incaseofnon-contactsystem(UnionsHISOMETseries),accuratemeasurementscanbetakenwithoutbeingaffectedbyphysicaldamagestoaspecimen.Non-Contact Depth Measuring Microscope System DH2/IMHFeaturesPage10Non-Contact Depth Measuring Microscope System DH2/IMH*Astheoperationissosimplelikeamicroscope,thisisthemostsuitablemeasuringmicroscopesystemforvariouskindsofapplications.*Bothmeasuringfromhighplacetolowplace,andlowtohigharepossible.(Z-axisvalueofH1minustheoneofH2=heightordepthtobemeasured.)*Sincetheprecisefocusindicatorbasedonthe“split-target”methodhasbeenadopted,highly-accuratedepthmeasurementscanbetakensimplybycoincidingthetwohalvesofTargetMark.ApplicationsPage11StepsofleadframeStepsofleadframeNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofstepsbetweendiepadandouterlead.TheautomatictypeofDH2isadoptedastheJapaneseleadingleadframemanufacturers.ApplicationsPage12CurvatureofleadframeCurvatureofleadframeNon-Contact Depth Measuring Microscope System DH2/IMHCurvaturecanbeinspectedbymeasurementofseveralpoints.ApplicationsPage13ProjectionofheadontheVTRdrumProjectionofheadontheVTRdrumNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage14Terminalstepsonmulti-layerPCboardTerminalstepsonmulti-layerPCboardNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofthicknessofelectrode.ApplicationsPage15DepthofmetalmoldDepthofmetalmoldNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofabrasionloss.ApplicationsPage16HeightofbumpHeightofbumpNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage17HeightofbondingwireandsolderballHeightofbondingwireandsolderballNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage18ElectrongunElectrongunNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofelectrongunforCRT.ApplicationsPage19DepthofrodlensandconnectorDepthofrodlensandconnectorNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage20Thicknessofspacer(Clearancegapbetweenglasssubstrates.)Thicknessofspacer(Clearancegapbetweenglasssubstrates.)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage21ProbeHeight(CheckingthedegreeofWear&Tear)ProbeHeight(CheckingthedegreeofWear&Tear)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage22GrooveDepthofOpenningSectiononCanTopGrooveDepthofOpenningSectiononCanTopNon-Contact Depth Measuring Microscope System DH2/IMHWhenthegrooveistooshallow,itisverydifficulttoopenthecan.Whenitistoodeep,thecovercomesofftooeasily.ApplicationsPage23HeightofStepsonWaferHeightofStepsonWaferNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage24LeadFrameStepHeightLeadFrameStepHeightNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage25StepHeight(BearingofMotor)StepHeight(BearingofMotor)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage26ProtrusionHeightProtrusionHeight（VideoVideo HeadHead）Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage27ArmHeight(HDD)ArmHeight(HDD)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage28MeasurementofagapinLiquidMeasurementofagapinLiquidCrystalDisplayCrystalDisplayNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofminuteopeningMeasurementofdepthofminuteopeningAgapbetweenliquidcrystalglassplatesEnabletogetbestfocusthroughglassplateDepthofaholeDepthApplicationsPage29MeasurementofthicknessofwiringMeasurementofthicknessofwiringpatternsonPCBpatternsonPCBNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofetchingamount(depth)Measurementofetchingamount(depth)CopperwiringpatternDepthThicknessofcopperwiringpatternsPCBApplicationsPage30MeasurementofdepthoftrenchstructureMeasurementofdepthoftrenchstructureNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementoffilmthicknessMeasurementoffilmthicknessDepthTransparentfilmMetal,glass,plastic,etc.FilmthicknessApplicationsPage31ThicknessofsoldercreamThicknessofsoldercreamNon-Contact Depth Measuring Microscope System DH2/IMHHeightofminutestructureHeightofminutestructureSoldercreamBeaten-copperPCBThicknessHeightApplicationsPage32MeasurementofglassdefectMeasurementofglassdefectNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofheightofCOBMeasurementofheightofCOB(ChipOnBoard)(ChipOnBoard)GlassDepthBondingwireChipSubstrateHeightApplicationsPage33MeasurementofdepthofpunchmarkMeasurementofdepthofpunchmarkNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdegreeofevennessMeasurementofdegreeofevennessDepthPoint-APoint-BMeasuringhowdifferentbetweenPoint-A&Point-BApplicationsPage34MeasurementofplasticmoldedcomponentMeasurementofplasticmoldedcomponentNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofscratchonMeasurementofdepthofscratchonmetalsurfacemetalsurfaceThicknessDepthApplicationsPage35MeasurementofpartsofmicromachineMeasurementofpartsofmicromachineNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofMeasurementofdepthofcorrosiononmetalsurfacecorrosiononmetalsurfaceThicknessDepthApplicationsPage36MeasurementofheightofforeignbodyMeasurementofheightofforeignbodyNon-Contact Depth Measuring Microscope System DH2/IMHHeightApplicationsPage28ExampleofIntegrationintoEquipment/SystemExampleofIntegrationintoEquipment/SystemNon-Contact Depth Measuring Microscope System DH2/IMHThedifferencebetweenLaserMeterandMeasuringMicroscopePage29WithDH2/IMH,itispossibletoobservemeasuringpointwhilemeasuring.WithDH2/IMH,itispossibletoobservemeasuringpointwhilemeasuring.Non-Contact Depth Measuring Microscope System DH2/IMHUltraHighMagnificationObjectivePLLWDM100XPage30StillHigherAccuracycanbeachievedbyuseofPLLWDM100X.StillHigherAccuracycanbeachievedbyuseofPLLWDM100X.*HighlymagnifiedimagefacilitatesjudgementofTargetMarkcoincedence,eliminatingthepossibilitiesofjudgementerrors.*Idealforobservationoffinematerials.Non-Contact Depth Measuring Microscope System DH2/IMHSelectionofTargetMarkPage31Operatormaychoosebetweenthetwokindsoftargetmarksinaccordancewithreflectivenessoftheobject.ItisalsopossibletohaveanimagewithoutTargetMarkatthetimeofphotographingorTVmonitorobservation.Non-Contact Depth Measuring Microscope System DH2/IMHBlackLineWhiteLineondarkbackgroundNoTargetMarkOrdinaryObjectHighlyReflectiveObjectForphotographing/TVmonitorobservationStagesPage32Non-Contact Depth Measuring Microscope System DH2/IMHMeasuringGauge&CounterPage33Non-Contact Depth Measuring Microscope System DH2/IMHDH2SystemDiagramPage34Non-Contact Depth Measuring Microscope System DH2/IMHLightsourcePESphotographicunitErectedtrinocularErectedbinocular1000505S505L5105100RotarytableStagesTVmonitorAFunitIMHSystemDiagramPage35Non-Contact Depth Measuring Microscope System DH2/IMHDH2SystemDiagramForZ-AXISIndicatorPage36Non-Contact Depth Measuring Microscope System DH2/IMHStandardComposition(DH2-T3)Page37Non-Contact Depth Measuring Microscope System DH2/IMHStandardComposition(DH2-T5)Page38Non-Contact Depth Measuring Microscope System DH2/IMHStandardCompositionDH2-T4)Page39Non-Contact Depth Measuring Microscope System DH2/IMH