非接触式台阶仪.pptx-资源下载-咨信网-让知识获取变得高效

非接触式台阶仪.pptx

1、Non-Contact Depth Measuring Microscope System DH2/IMHProductSummaryHigh-precisionnon-contactdepthmeasurementispossiblewithobservingthesurfaceofHigh-precisionnon-contactdepthmeasurementispossiblewithobservingthesurfaceofmeasuringpoint,byverysimpleoperation,withoutpersonalequations.measuringpoint,byve

2、rysimpleoperation,withoutpersonalequations.*Hisometisanon-contactdepthmeasuringmicroscopesystem.*Designedbasedonanopticaltypefocalpointdetectionsystem.*Adoptingprecisefocusindicator,itspossibletomeasureheight,depth,steps,etc.withobservingthesurfaceofmeasuringpoint,bysimplycoincidingthehalvesofaninde

3、xgraticule(TargetMark).*Sincethereisnoconcernforphysicaldamagessuchasdistortion,blowornickstoaspecimenbecauseofnon-contactsystem,HisometisoptimumformeasuringelectroniccomponentssuchasICsorhigh-precisionprocessingparts.Page1PrincipleofmeasurementThismicroscopesystemoffersaprecisefocusindicatorconsist

4、ingofanindexgraticule(TargetMark)andabeamsplittingprismbuiltintoreflectingilluminationopticalsystemofmicroscope.Andithasbeendesignedbasedontheopticalprinciplethatatjustfocusstatus,ofwhichtheupperandlowerhalvescoincide,canbeobservedabovethefocusedimageofaspecimen,andthatwhendefocusedevenslightly,thei

5、ndexlineissplitintotwolinesintheupperandlowerhalvesofthegraticule.Page2Non-Contact Depth Measuring Microscope System DH2/IMHPrincipleofmeasurementPage3Non-Contact Depth Measuring Microscope System DH2/IMH*UnderDefocusedcondition,horizontalcenterlineofTargetMarksplitsintotwolinesintheupperandlowerhal

6、ves.*UnderJustfocuscondition,theupperandlowerhalvesofTargetMarkcoincide.Humaneyesabilitytodistinguish2pointsPage4Non-Contact Depth Measuring Microscope System DH2/IMHThis chart and mathematical formula mention how accurate human eyes ability todistinguish2pointsis.Humaneyesabilitytodistinguish2lines

7、Page5Non-Contact Depth Measuring Microscope System DH2/IMHThis chart and mathematical formula mention how accurate human eyes ability todistinguishdiscrepancybetween2linesis.Thechartandmathematicalformulashowthatdistinguishing2linesisapprox.3timessensitivethandistinguishing2points,becauseofhumaneyes

8、structure.MethodofmeasurementPage6*AnexactfocalpointissecuredbyconfirmingthattheverticalindexlinesintheupperandlowerhalvesofTargetMarkcoincidewithstraightlinesexactly,ratherthanbymakingjudgementsastowhetherimageofaspecimensurfaceisblurredornot.*Sincethisisauniquesystemthatisneitheraffectedbythefocal

9、depthofobjectivelensesnordependentontheabilityofthehumaneyestodistinguishtwopoints,afocalpointcanbedeterminedveryaccuratelyascomparedwithotherfocusingsystems.*Thisfocusingsystemandthedigitalgaugeallownon-contact,highprecisionmeasurementsofstepheightsbetweensurfaces.Non-Contact Depth Measuring Micros

10、cope System DH2/IMHPage7Non-Contact Depth Measuring Microscope System DH2/IMHUsingaspecimenhavingstepsonit,letsmeasuretheheightofdifferencebetweenH1pointandH2point.AtH1point,aftergettingjustfocusconditionbycoincidingupperandlowerTargetMark,thentravelastagehorizontallytoH2point,thencoincidelowerandup

11、perTargetMarkagaintogetjustfocusconditionatH2point.Z-axisindicatorreadstheheightofH2point,whichmeansthedifferenceofheightbetweenH1&H2.ActualmeasurementActualmeasurementPage8Non-Contact Depth Measuring Microscope System DH2/IMHActually,Z-axisindicatorreadsthetraveledheightofmainbodyofmicroscopeitself

12、fromH1pointtoH2.Therefore,resetthevalueofZ-axisindicatorzerowhengettingjustfocusconditionatH1point,thentravelingtoH2pointtogetjustfocusconditionagain.Z-axisindicatorreadsthevaluehowmuchitmovedvertically,whichmeansthedifferencebetweenH1&H2.FeaturesPage9Asafocalpointisdetectedunderthenon-contactoptica

13、lmethod,measurementscanbetakenwithoutbeingaffectedbyphysicaldamagestoaspecimensuchasdistortion,blowornicks,etc.Incaseofcontactsystem,sincethepointcontactedissaggedifaspecimenissoft,accuratemeasurementisdifficult.Incaseofnon-contactsystem(UnionsHISOMETseries),accuratemeasurementscanbetakenwithoutbein

14、gaffectedbyphysicaldamagestoaspecimen.Non-Contact Depth Measuring Microscope System DH2/IMHFeaturesPage10Non-Contact Depth Measuring Microscope System DH2/IMH*Astheoperationissosimplelikeamicroscope,thisisthemostsuitablemeasuringmicroscopesystemforvariouskindsofapplications.*Bothmeasuringfromhighpla

15、cetolowplace,andlowtohigharepossible.(Z-axisvalueofH1minustheoneofH2=heightordepthtobemeasured.)*Sincetheprecisefocusindicatorbasedonthe“split-target”methodhasbeenadopted,highly-accuratedepthmeasurementscanbetakensimplybycoincidingthetwohalvesofTargetMark.ApplicationsPage11StepsofleadframeStepsoflea

16、dframeNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofstepsbetweendiepadandouterlead.TheautomatictypeofDH2isadoptedastheJapaneseleadingleadframemanufacturers.ApplicationsPage12CurvatureofleadframeCurvatureofleadframeNon-Contact Depth Measuring Microscope System DH2/IMHCurvaturecanb

17、einspectedbymeasurementofseveralpoints.ApplicationsPage13ProjectionofheadontheVTRdrumProjectionofheadontheVTRdrumNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage14Terminalstepsonmulti-layerPCboardTerminalstepsonmulti-layerPCboardNon-Contact Depth Measuring Microscope System DH2/

18、IMHMeasurementofthicknessofelectrode.ApplicationsPage15DepthofmetalmoldDepthofmetalmoldNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofabrasionloss.ApplicationsPage16HeightofbumpHeightofbumpNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage17Heightofbondingwirean

19、dsolderballHeightofbondingwireandsolderballNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage18ElectrongunElectrongunNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofelectrongunforCRT.ApplicationsPage19DepthofrodlensandconnectorDepthofrodlensandconnectorNon

20、Contact Depth Measuring Microscope System DH2/IMHApplicationsPage20Thicknessofspacer(Clearancegapbetweenglasssubstrates.)Thicknessofspacer(Clearancegapbetweenglasssubstrates.)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage21ProbeHeight(CheckingthedegreeofWear&Tear)ProbeHeight(

21、CheckingthedegreeofWear&Tear)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage22GrooveDepthofOpenningSectiononCanTopGrooveDepthofOpenningSectiononCanTopNon-Contact Depth Measuring Microscope System DH2/IMHWhenthegrooveistooshallow,itisverydifficulttoopenthecan.Whenitistoodeep,the

22、covercomesofftooeasily.ApplicationsPage23HeightofStepsonWaferHeightofStepsonWaferNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage24LeadFrameStepHeightLeadFrameStepHeightNon-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage25StepHeight(BearingofMotor)StepHeight(Be

23、aringofMotor)Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage26ProtrusionHeightProtrusionHeight（VideoVideo HeadHead）Non-Contact Depth Measuring Microscope System DH2/IMHApplicationsPage27ArmHeight(HDD)ArmHeight(HDD)Non-Contact Depth Measuring Microscope System DH2/IMHApplication

24、sPage28MeasurementofagapinLiquidMeasurementofagapinLiquidCrystalDisplayCrystalDisplayNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofminuteopeningMeasurementofdepthofminuteopeningAgapbetweenliquidcrystalglassplatesEnabletogetbestfocusthroughglassplateDepthofaholeDepthApplica

25、tionsPage29MeasurementofthicknessofwiringMeasurementofthicknessofwiringpatternsonPCBpatternsonPCBNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofetchingamount(depth)Measurementofetchingamount(depth)CopperwiringpatternDepthThicknessofcopperwiringpatternsPCBApplicationsPage30Measurem

26、entofdepthoftrenchstructureMeasurementofdepthoftrenchstructureNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementoffilmthicknessMeasurementoffilmthicknessDepthTransparentfilmMetal,glass,plastic,etc.FilmthicknessApplicationsPage31ThicknessofsoldercreamThicknessofsoldercreamNon-Contact De

27、pth Measuring Microscope System DH2/IMHHeightofminutestructureHeightofminutestructureSoldercreamBeaten-copperPCBThicknessHeightApplicationsPage32MeasurementofglassdefectMeasurementofglassdefectNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofheightofCOBMeasurementofheightofCOB(ChipO

28、nBoard)(ChipOnBoard)GlassDepthBondingwireChipSubstrateHeightApplicationsPage33MeasurementofdepthofpunchmarkMeasurementofdepthofpunchmarkNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdegreeofevennessMeasurementofdegreeofevennessDepthPoint-APoint-BMeasuringhowdifferentbetweenPoint-

29、A&Point-BApplicationsPage34MeasurementofplasticmoldedcomponentMeasurementofplasticmoldedcomponentNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofscratchonMeasurementofdepthofscratchonmetalsurfacemetalsurfaceThicknessDepthApplicationsPage35MeasurementofpartsofmicromachineMeas

30、urementofpartsofmicromachineNon-Contact Depth Measuring Microscope System DH2/IMHMeasurementofdepthofMeasurementofdepthofcorrosiononmetalsurfacecorrosiononmetalsurfaceThicknessDepthApplicationsPage36MeasurementofheightofforeignbodyMeasurementofheightofforeignbodyNon-Contact Depth Measuring Microscop

31、e System DH2/IMHHeightApplicationsPage28ExampleofIntegrationintoEquipment/SystemExampleofIntegrationintoEquipment/SystemNon-Contact Depth Measuring Microscope System DH2/IMHThedifferencebetweenLaserMeterandMeasuringMicroscopePage29WithDH2/IMH,itispossibletoobservemeasuringpointwhilemeasuring.WithDH2

32、/IMH,itispossibletoobservemeasuringpointwhilemeasuring.Non-Contact Depth Measuring Microscope System DH2/IMHUltraHighMagnificationObjectivePLLWDM100XPage30StillHigherAccuracycanbeachievedbyuseofPLLWDM100X.StillHigherAccuracycanbeachievedbyuseofPLLWDM100X.*HighlymagnifiedimagefacilitatesjudgementofTa

33、rgetMarkcoincedence,eliminatingthepossibilitiesofjudgementerrors.*Idealforobservationoffinematerials.Non-Contact Depth Measuring Microscope System DH2/IMHSelectionofTargetMarkPage31Operatormaychoosebetweenthetwokindsoftargetmarksinaccordancewithreflectivenessoftheobject.Itisalsopossibletohaveanimage

34、withoutTargetMarkatthetimeofphotographingorTVmonitorobservation.Non-Contact Depth Measuring Microscope System DH2/IMHBlackLineWhiteLineondarkbackgroundNoTargetMarkOrdinaryObjectHighlyReflectiveObjectForphotographing/TVmonitorobservationStagesPage32Non-Contact Depth Measuring Microscope System DH2/IM

35、HMeasuringGauge&CounterPage33Non-Contact Depth Measuring Microscope System DH2/IMHDH2SystemDiagramPage34Non-Contact Depth Measuring Microscope System DH2/IMHLightsourcePESphotographicunitErectedtrinocularErectedbinocular1000505S505L5105100RotarytableStagesTVmonitorAFunitIMHSystemDiagramPage35Non-Con

36、tact Depth Measuring Microscope System DH2/IMHDH2SystemDiagramForZ-AXISIndicatorPage36Non-Contact Depth Measuring Microscope System DH2/IMHStandardComposition(DH2-T3)Page37Non-Contact Depth Measuring Microscope System DH2/IMHStandardComposition(DH2-T5)Page38Non-Contact Depth Measuring Microscope System DH2/IMHStandardCompositionDH2-T4)Page39Non-Contact Depth Measuring Microscope System DH2/IMH

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