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1、芯片可靠性测试 质量（Quality）和可靠性（Reliability）在一定程度上可以说是IC产品的生命，好的品质，长久的耐力往往就是一颗优秀IC产品的竞争力所在。在做产品验证时我们往往会遇到三个问题，验证什么，如何去验证，哪里去验证，这就是what, how , where 的问题了。 解决了这三个问题，质量和可靠性就有了保证，制造商才可以大量地将产品推向市场，客户才可以放心地使用产品。本文将目前较为流行的测试方法加以简单归类和阐述，力求达到抛砖引玉的作用。 Quality 就是产品性能的测量，它回答了一个产品是否合乎SPEC的要求，是否符合各项性能指标的问题；Relia
2、bility则是对产品耐久力的测量，它回答了一个产品生命周期有多长，简单说，它能用多久的问题。所以说Quality解决的是现阶段的问题，Reliability解决的是一段时间以后的问题。 知道了两者的区别，我们发现，Quality的问题解决方法往往比较直接，设计和制造单位在产品生产出来后，通过简单的测试，就可以知道产品的性能是否达到SPEC 的要求，这种测试在IC的设计和制造单位就可以进行。相对而言，Reliability的问题似乎就变的十分棘手，这个产品能用多久，who knows? 谁会能保证今天产品能用，明天就一定能用？为了解决这个问题，人们制定了各种各样的标准，如
3、 MIT-STD-883E Method 1005.8 JESD22-A108-A EIAJED- 4701-D101 等等，这些标准林林总总，方方面面，都是建立在长久以来IC设计，制造和使用的经验的基础上，规定了IC测试的条件，如温度，湿度，电压，偏压，测试方法等，获得标准的测试结果。这些标准的制定使得IC测试变得不再盲目，变得有章可循，有法可依，从而很好的解决的what，how的问题。而Where的问题，由于Reliability的测试需要专业的设备，专业的器材和较长的时间，这就需要专业的测试单位。这种单位提供专业的测试机台，并且根据国际标准进行测试，提供给
4、客户完备的测试报告，并且力求准确的回答Reliability的问题 在简单的介绍一些目前较为流行的Reliability的测试方法之前，我们先来认识一下IC产品的生命周期。典型的IC产品的生命周期可以用一条浴缸曲线（Bathtub Curve）来表示，如图所示 Region (I) 被称为早夭期（Infancy period）。这个阶段产品的 failure rate 快速下降，造成失效的原因在于IC设计和生产过程中的缺陷； Region (II) 被称为使用期（Useful life period）。 在这个阶段产品的failure rate保持
5、稳定，失效的原因往往是随机的，比如EOS，温度变化等等； Region (III) 被称为磨耗期（Wear-Out period）。在这个阶段failure rate 会快速升高，失效的原因就是产品的长期使用所造成的老化等。 认识了典型IC产品的生命周期，我们就可以看到，Reliability的问题就是要力图将处于早夭期failure的产品去除并估算其良率，预计产品的使用期，并且找到failure的原因，尤其是在IC生产，封装，存储等方面出现的问题所造成的失效原因。 下面就是一些 IC Product Level reliability test items l >Ro
6、bustness test items ESD, Latch-up 对于Robustness test items 听到的ESD，Latch-up 问题，有很多的精彩的说明，这里就不再锦上添花了。下面详细介绍其他的测试方法。 l >Life test items EFR, OLT (HTOL), LTOL EFR: Early fail Rate Test Purpose: 评估工艺的稳定性，加速缺陷失效率，去除由于天生原因失效的产品。 Test condition: 在特定时间内动态提升温度和电压对产品进行测试 F
7、ailure Mechanisms：材料或工艺的缺陷包括诸如氧化层缺陷，金属刻镀，离子玷污等由于生产造成的失效 Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 1015.9 JESD22-A108-A EIAJED- 4701-D101 HTOL/ LTOL：High/ Low Temperature Operating Life Purpose: 评估器
8、件在超热和超电压情况下一段时间的耐久力 Test condition: 125?C，1.1VCC, 动态测试 Failure Mechanisms：电子迁移，氧化层破裂，相互扩散，不稳定性，离子玷污等 Reference： 简单的标准如下表所示，125?C条件下1000小时测试通过IC可以保证持续使用4年，2000小时测试持续使用8年；150?C 测试保证使用8年，2000小时保证使用28年。 125?C 150?C
9、 1000 hrs 4 years 8 years 2000 hrs 8 years 28 years 具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 1005.8 JESD22-A108-A
10、 EIAJED- 4701-D101 l >Environmental test items PRE-CON, THB, HAST, PCT, TCT, TST, HTST, Solderability Test, Solder Heat Test PRE-CON: Precondition Test Purpose: 模拟IC在使用之前在一定湿度，温度条件下存储的耐久力，也就是IC从生产到使用之间存储的可靠性。 Test Flow:
11、 Step 1: SAM (Scanning Acoustic Microscopy) Step 2: Temperature cycling - 40?C(or lower) ~ 60?C(or higher) for 5 cycles to simulate shipping conditions Step 3: Baking At minimum 125?C for 24 hours to remove
12、all moisture from the package Step 4: Soaking Using one of following soak conditions -Level 1: 85?C / 85%RH for 168 hrs （多久都没关系） -Level 1: 85?C / 60%RH for 168 hrs （一年左右） -Level 1: 30?C / 60%RH
13、 for 192 hrs （一周左右） Step5: Reflow 240?C (- 5?C) / 225?C (-5?C) for 3 times (Pb-Sn) 245?C (- 5?C) / 250?C (-5?C) for 3 times (Lead-free) * choose according the package size Failure Mechanisms:
14、封装破裂，分层 Reference：具体的测试条件和估算结果可参考以下标准 JESD22-A113-D EIAJED- 4701-B101 THB: Temperature Humidity Bias Test Purpose: 评估IC产品在高温，高压，偏压条件下对湿气的抵抗能力，加速其失效进程 Test condition: 85?C，85%RH, 1.1 VCC, Static b
15、ias Failure Mechanisms：电解腐蚀 Reference：具体的测试条件和估算结果可参考以下标准 JESD22-A101-D EIAJED- 4701-D122 HAST: Highly Accelerated Stress Test Purpose: 评估IC产品在偏压下高温，高湿，高气压条件下对湿度的抵抗能力，加速其失效过程 Test condition: 130?
16、C， 85%RH, 1.1 VCC, Static bias，2.3 atm Failure Mechanisms：电离腐蚀，封装密封性 Reference：具体的测试条件和估算结果可参考以下标准 JESD22-A110 PCT: Pressure Cook Test (Autoclave Test) Purpose: 评估IC产品在高温，高湿，高气压条件下对湿度的抵抗能力，加速其失效过程
17、 Test condition: 130?C， 85%RH, Static bias，15PSIG（2 atm） Failure Mechanisms：化学金属腐蚀，封装密封性 Reference：具体的测试条件和估算结果可参考以下标准 JESD22-A102 EIAJED- 4701-B123 *HAST与THB的区别在于温度更高，并且考虑到压力因素，实验时间可以缩短，而PCT则不加偏压，但湿度增大。
18、TCT: Temperature Cycling Test Purpose: 评估IC产品中具有不同热膨胀系数的金属之间的界面的接触良 率。方法是通过循环流动的空气从高温到低温重复变化。 Test condition: Condition B: - 55?C to 125?C Condition C: - 65?C to 150?C Failure Mechanisms：电介质的断裂，导体和绝缘体的断裂，不同界面的分层 Reference：具体的测试条件和估算结果可参考
19、以下标准 MIT-STD-883E Method 1010.7 JESD22-A104-A EIAJED- 4701-B-131 TST: Thermal Shock Test Purpose: 评估IC产品中具有不同热膨胀系数的金属之间的界面的接触良 率。方法是通过循环流动的液体从高温到低温重复变化。 Test condition: Cond
20、ition B: - 55?C to 125?C Condition C: - 65?C to 150?C Failure Mechanisms：电介质的断裂，材料的老化（如bond wires）, 导体机 械变形 Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 1011.9 JESD22-B106
21、 EIAJED- 4701-B-141 * TCT与TST的区别在于TCT偏重于package 的测试，而TST偏重于晶园的测 试 HTST: High Temperature Storage Life Test Purpose: 评估IC产品在实际使用之前在高温条件下保持几年不工作条件 下的生命时间。 Test condition: 150?C Failure Mechanisms：化学和扩散效应，Au-Al 共金效应 Reference：具体的测试条件和估算结果可参考以下标准
22、 MIT-STD-883E Method 1008.2 JESD22-A103-A EIAJED- 4701-B111 Solderability Test Purpose: 评估IC leads在粘锡过程中的可考度 Test Method: 1. 蒸汽老化8 小时 2. 侵入245?C锡盆中 5秒 Failu
23、re Criterion：至少95％良率 Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 2003.7 JESD22-B102 SHT Test: Solder Heat Resistivity Test Purpose: 评估IC 对瞬间高温的敏感度 Test Method: 侵入260?C 锡盆中10秒 Failure Crit
24、erion：根据电测试结果 Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 2003.7 EIAJED- 4701-B106 >Endurance test items Endurance cycling test, Data retention test Endurance Cycling Test Purpose: 评
25、估非挥发性memory器件在多次读写算后的持久性能 Test Method: 将数据写入memory的存储单元，在擦除数据，重复这个过 程多次 Test condition: 室温，或者更高，每个数据的读写次数达到100k~1000k Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 1033 Data Retention Test Purpos
26、e: 在重复读写之后加速非挥发性memory器件存储节点的电荷损失 Test condition: 在高温条件下将数据写入memory存储单元后，多次读取验 证单元中的数据 Failure Mechanisms：150?C Reference：具体的测试条件和估算结果可参考以下标准 MIT-STD-883E Method 1008.2 MIT-STD-883E Method 1033 在了解上述的IC测试方法之后，IC的设计
27、制造商就需要根据不用IC产品的 性能，用途以及需要测试的目的，选择合适的测试方法，最大限度的降低IC测 试的时间和成本，从而有效控制IC产品的质量和可靠度。 Basic FA Flows Every experienced failure analyst knows that every FA is unique. Nobody can truly say that he or she has developed a standard FA flow for every FA that will come his or her way. FA's have a tend
28、ency of directing themselves, with each subsequent step depending on the outcome of the previous step. The flow of an FA is influenced by a multitude of factors: the device itself, the application in which it failed, the stresses that the device has undergone prior to failure, the point
29、of failure, the failure rate, the failure mode, the failure attributes, and of course, the failure mechanism. Nonetheless, FA is FA, so it is indeed possible to define to a certain degree a 'standard' FA flow for every failure mechanism. This article aims to give the reader a basic
30、 idea of how the FA flow for a given failure mechanism may be standardized. 'Standardization' in this context does not mean defining a step-by-step FA procedure to follow, but rather what to look for when analyzing failures depending on what the observed or suspected failure mechanism is.
31、 Basic Die-level FA Flow 1) Failure Information Review. Understand thoroughly the customer's description of the failure. Determine: a) the specific electrical failure mode that the customer is experiencing; b) the point of failure or where the failure was encountered (fi
32、eld or manufacturing line and at which step?); c) what conditions the samples have already gone through or been subjected to; and d) the failure rate observed by the customer. 2) Failure Verification. Verify the customer's failure mode by electrical testing. Check the datalog results fo
33、r consistency with what the customer is reporting. 3) External Visual Inspection. Perform a thorough external visual inspection on the sample. Note all markings on the package and look for external anomalies, i.e., missing/bent leads, package discolorations, package cracks/chip-outs/scra
34、tches, contamination, lead oxidation/corrosion, illegible marks, non-standard fonts, etc. 4) Bench Testing. Verify the electrical test results by bench testing to ensure that all ATE failures are not due to contact issues only. The ideal case is for the customer's reported failure mode, A
35、TE results, and bench test results to be consistent with each other. 5) Curve Tracing. Perform curve tracing to identify which pins exhibit current/voltage (I/V) anomalies. The objective of curve tracing is to look for open or shorted pins and pins with abnormal I/V characteristics (e
36、xcessive leakage, abnormal breakdown voltages, etc.). FA may then be focused on circuits involving these anomalous pins. Dynamic curve tracing, wherein the unit is powered up while undergoing curve tracing, may be performed if static curve tracing does not reveal any anomalies. 6)
37、X-ray Inspection. Perform x-ray inspection to look for internal package anomalies such as broken wires, missing wires, incorrect or missing die, excessive die attach voids, etc, without having to open the package. Xray inspection results must be consistent with curve trace results, e.g., if x-ray
38、inspection revealed a broken wire at a pin, then curve tracing should reveal that pin to be open. 7) CSAM. Perform CSAM on plastic packages to determine if the samples have any internal delaminations that may lead to other failure attributes such as corrosion, broken wires, and lifted bon
39、ds. 8) Decapsulation. Once all the non-destructive steps such as those above have been completed, the samples may be subjected to decapsulation to expose the die and other internal features of the device for further FA. 9) Internal Visual Inspection. Perform internal visual
40、inspection after decap. This is usually done using a low-power microscope and a high-power microscope, proceeding from low magnification to higher ones. Look for wire/bond anomalies, die cracks, wire and die corrosion, die scratches, EOS/ESD sites, fab defects, and the like. SEM inspection may be
41、needed in some instances. 10) Hot Spot Detection. If curve trace results indicate some major discrepancies between the I/V characteristics (especially with regard to power dissipation) of the samples and known good units, then the samples may have localized heating on the die. For exampl
42、e, an abnormally large current flowing between an input pin and GND may mean a short circuit from this input pin to GND. Shorts such as this will emit heat that can be located by hot spot detection techniques. 11) Light Emission Microscopy. If the device does not exhibit abnormalities i
43、n power dissipation that may indicate hot spots, light emission microscopy may be performed to look for defects that emit light. Note that an emission site does not mean that it is the failure site. 12) Microprobing. Microprobing becomes necessary if no hot spots nor abnormal photoemis
44、sions were seen from the samples. Microprobing may entail extensive circuit analysis wherein the failure site is pinpointed by analyzing the die circuit stage by stage or section by section. The thought process used when troubleshooting a full-size circuit also applies to die circuit troubleshooting. 13) Die Deprocessing. Perform die deprocessing to look for subsurface damage or defects if the above FA steps were not successful in locating the failure site.
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