乌克兰Omega-Crystals-蓝宝石单晶炉---Omega-M200..doc

Omega-M200

The device is intended for cultivation of sapphire monocrystals weighing up to 38kg, with a diameter of up to 200mm and a length of up to 300mm, by the method GOI (Kyropoulos).
蓝宝石单晶炉：蓝宝石单晶生长方法为GOI法（泡生法），单晶最大重量38kg，最大直径200mm，最大长度300mm。

Characteristics

Weight of the load of raw material in the melting pot, kg: 38.
Temperature of molten material, Celsius: 2100.
Hypobaric pressure in the chamber, Pa: 6x10E-5
Run of the rod, mm: 150.
Working speed of the rod, mm/hour: 0,1-1,2
Power consumption, kilowatt: 60, peak- kilowatt: 80.
Cooling water debit, cubic meter/hour: 3.5

Inert gas debit, cubic meter/cycle: 0,2.
Weight, kg 2108.
技术特征：
熔炉填料量：38 kg
熔体温度：2100摄氏度
腔内气压：6x10E-5Pa
晶棒长度：150mm
拉速：0.1-1.2 mm/hr
能耗：60 kW，峰值为80 kW
冷却水流量：3.5 m3/hr
惰性气体流量：0.2 m3/循环
重量：2108kg
Additional Parameters

Method of heating: resistive.
Working environment: vacuum, Pa: 6х10-5
The speed of the rod (the speed varies in 0,1mm/hour increments), mm/hour:
- the lowest speed:  0.1
- the highest speed: 1.2
Speed of the accelerated movement of the rod, mm/hour: 20;
Accuracy of maintenance of the speed of the rod, %: ±2;
Rotation frequency of the rod , rotations/min:
- the lowest speed:3;
- the highest speed: 8.
Accuracy of stabilization of voltage on the heater:
- in the range from 2,5V to 5V: ±2%;
- in the range from 5V to 7V: ±1%;
- in the range from 7V to 10V: ±0,1%.
附加参数：
加热方式：电阻加热
工作环境：真空，6x10E-5Pa
拉速：（速度变化最小单位是0.1mm/hour），
最小值： 0.1 mm/hour
最大值： 1.2 mm/hour
拉杆快升速度：6.9x10E-6m/s(25mm/hour)
拉速精度维护：±2%
拉杆转速：
最低转速：0.05转/秒 3转/分
最高速度：0.133转/秒 8转/分
加热装置电压稳定性：
在范围2.5-5V， ±2%
在范围5-7V, ±1%
在范围7-10V，±0.1%

Installation requirements

A shop with the following parameters of microclimate:
- temperature 20±5°С;
- relative humidity below 90%;

Also:
- a premise of 9m2;
- a sewer discharge at the floor level or lower with a conditional pass of at least 70mm;
- a contour of grounding, with resistance value between the grounding bolt and any of accessible parts of the device should be 0.1ohm or lower.

安装要求
车间环境气候参数要求：
温度20±5℃；
相对湿度：低于90%；
面积至少9平方米；
地板平面上铺设排水道或更低的位置不小于70mm的排水道；
外壳接地，任何可以触及到的零部件同接地螺钉之间的电阻要小于0.1ohm

Operational supplies:

Demineralized water under a pressure of 4х105±0.5х105Pa(Pascal).
Water temperature must not be higher than 20±5°С; debit of water should be 3.5 m3/hour;
Nitrogen gas, purified to the level required by GOST 9293-74 and supplied under 0,5х105Pa of pressure (0,5kg/cm2).
The power supply of the device is realized by three-phase four-wire (with a zero wire) networks of alternating electrical current with a voltage of 380V, a frequency of 50(60)Hz.
Quality standards of electrical current should meet the requirements of GOST 1.3109-87
运行供给：
水压为4x10E5 ± 0.5x10E5Pa (4±0.5kg/cm2) 的去离子水/超纯水；
水温不得高于20±5℃，水流为3.5 m3/hour；
氮气压力为0.5x10E5Pa (0.5kg/cm2)，纯度符合GOST 9293-74标准；
380V，50（60）HZ三相四线交流电供电，电流标准符合GOST 1.3109-87标准。