1、按一下以編輯母片標題樣式,Click to edit Master text styles,Second level,Third level,Fourth level,Fifth level,#,251 CHUNG-YANG ROAD,HSINCHU TEL:(03)533-5163,FAX:(03)542-5001,Training Coursefor OnmiMap RS75/tc,FaST Division,Taiwan,Albert Yang (,楊雙彰,),TEL:(03)543-1238,albert.yangkla-,T h e Y i e l d M a n a g e m e
2、 n t C o m p a n y,RS-75 Training Schedule,Introduction,Operation,Maintenance,Application,HISTORY,R,S,3,5,C,/,C,A,R,S,5,5,/,t,c,R,S,7,5,C,P,U,4,8,6,/,3,3,M,h,z,4,8,6,/,3,3,/,6,6,M,h,z,4,8,6,/,6,6,M,h,z,H,a,r,d,D,r,i,v,e,r,1,1,0,M,B,1,1,0,M,B,3,3,0,M,B,C,a,r,t,r,i,d,g,e,D,r,i,v,e,r,N,/,A,S,t,a,n,d,a,
3、r,d,O,p,t,i,o,n,F,l,a,t,A,l,i,g,n,e,r,O,u,t,s,i,d,e,O,u,t,s,i,d,e,I,n,s,i,d,e,T,e,m,p,.,C,o,m,p,.,O,p,t,i,o,n,S,t,a,n,d,a,r,d,O,p,t,i,o,n,A,c,c,o,u,n,t,#,1,3,1,0,F,i,l,e,F,o,l,d,e,r,8,1,7,2,9,7,2,9,C,o,r,r,e,l,a,t,i,o,n,C,u,r,v,e,1,s,t,O,r,d,e,r,3,r,d,O,r,d,e,r,3,r,d,O,r,d,e,r,T,h,r,o,u,g,h,p,u,t,3,
4、8,w,p,h,3,8,w,p,h,1,0,0,w,p,h,A,v,a,i,l,a,b,l,e,N,o,N,o,Y,e,s,Measurement Specifications,Measurement range:5m Ohm/sq to 5M Ohm/sq,Absolute accuracy:bases on NIST(NBS)standard wafers corrected to 23 C:+-1%of NIST certified range,Measurement repeatability:based on Tencors“Probe Qualification Test”1”te
5、st diameter,using appropriate probe head:100 WPH,Typical measurement time,based on 49-site test,manually loaded single wafer,with pensation:=,F2 Combine Old Data,.,Press,F7 Folder Drctry,to see the file#.,Press,F4 Toggle,Process to change the formula or,F5 Select Process,to select the formula.,Input file#,Press,F1 Process,to begin.,Combine Data Screen,Trend Chart,
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