电热&水洗Scrubber_507BWA尾气处理器.ppt

www.mat.co.kr,*,M,icro,A,dvanced,T,echnology,2026-05-27,电加热,&,水洗,Local Scrubber,MAT507BW,A,2026-05-27,www.mat.co.kr,2,基本规格,规格,原理,电,热,&,水洗,尺寸,(WDH),7208501610mm,处理,容量,500slm,加热,室,-.,2,套并行加热器,-.,内建式水循环系统,-.,防腐蚀材料,-.,防堵塞设计,-.,自动清洁的空气喷嘴设计,-.,易于维护,应用,CVD,，,Diffusion,，,Implantation,重量,大约,400 Kg(D,ry,),450 Kg(,Wet,),2026-05-27,基本规格,No,名称,规格,1,进气管,NW50,2,加热室,INCONEL600+STS310+STS304,3,中间法兰,法兰,STS304,套管,STS310,4,吸收体,STS304,Teflon coating,5,水洗室,STS 304,Teflon coating,6,水位感应器,PVC,7,喷嘴,STS 304,Teflon coating,8,排气管,STS 304,Teflon coating,2026-05-27,燃烧空气,加热室,水洗室,Air,套管,燃烧室内反应,H,2,+1/2O,2,H,2,O,2C,2,H,25O,2,4CO,2,+2H,2,O,C,2,H,4,+3O,2,2CO,2,+2H,2,O,2NF3,N2+3F2,水洗室内反应,F*,HF and by-products capturing,循环泵,排放泵,自来水,排水口,排气,废气进口,H,2,NF3,C2H2,C2H4,处理后气体排放,H,2,C2H2,C2H4 99%,NF3 90%,流程图,2026-05-27,www.mat.co.kr,5,加热,室,4,个进气口,2,个,涡流空气喷嘴,自动清洁空气喷嘴,-,防止粉尘堆积,高防腐蚀材料,2,套并行加热系统,-.,备用加热系统,-.SiC,加热器,-.,双热传感器,外部可换式加热器,-.,不用打开气室,对热隔绝的双层防护,加热室分解图,加热棒保护套,加热棒,加热室,加热管,2026-05-27,www.mat.co.kr,6,中间法兰,已气流屏障防止从水洗室来的湿气,-.,防止粉尘在燃烧室内累积,延长,P.M.,频率,Sleeve N2,or Air,2026-05-27,www.mat.co.kr,7,水洗室,长气体通道提供良好的水溶性,-.,双吸收区域,-.,高效率,-.,有效清洁粉尘,两个目标喷嘴含盖四个方向,一个自动清洗喷嘴,-.,可程序化,-.,液位检查,不锈钢吸收器,电极式液位感知器,水洗室,1,st,Absorber Zone,2,nd,Absorber Zone,吸收箱,吸收器,2026-05-27,www.mat.co.kr,8,第三吸收区,第三吸收区,供应自来水,最后处理区,排放,循环,自来水,2026-05-27,www.mat.co.kr,9,直式结构,防爆之安全设计,-.,压力扩张将于水洗室内被缓冲,水洗室之容量三倍大于燃烧,室,由上向下流向,防止粉尘堵塞,方型燃烧与水洗室,-.,有效空间利用,-.,减少占地面积,2026-05-27,www.mat.co.kr,10,维护,简单容易的,维修,自动的乾,/,湿舱体的分离拆卸设计,简单,/,快速维修循环泵与管路,独特的水洗室与循环系统,减少维修点,2026-05-27,www.mat.co.kr,11,设备拆解,-.,减少人力需求,-.,快速清洁时间,99,BCl3,Boron Trichloride,2BCl3+3/2O2,B2O3+3Cl2,99,BF3,Boron Trifluoride,2BF3+3/2O2,B2O3+3F2,99,B2H6,Diborane,B2H6+3O2,B2O3+3H2O,99,Cl2,Chlorine,WET,99,HBr,Hydrogen Bromide,WET,99,HCl,Hydrogen Chloride,WET,99,PH3,Phosphine,2PH3+4O2,P2O5+3H2O,99,SiH4,Silane,SiH4+2O2,SiO2+2H2O,99,SiH2Cl2,Dichlorosilane,DCS,SiH2Cl2+3/2O2,SiO2+H2O+Cl2,99,Si(OC2H5)4,TetraEthylOrthoSilicate,TEOS,(C2H5O)4Si+12O2,8CO2+SiO2+10H2O,99,2026-05-27,厂务成本,厂务成本因各项目单价不同而有所变动,Utility cost,No,厂务,消耗,单位,单价,(US,$),单位,年费用,(US,$),1,电力,5,KW,50,KW/H,1,856,2,水,3,LPM,220,294,3,CDA,80,LPM,10,356,4,厂务年运转成本,US,$,2,506,2026-05-27,消耗品费用,消耗品,No,品名,数量,单价,(US,$),单位,使用寿命,年消耗,年费用,(,US$),1,加热棒,6,212,EA,2,年,4.5,953,2,O,型圈,2,42,EA,6,个月,4,169,3,吸收器,8,85,Kg,4,年,2.5,212,4,循环泵,2,424,EA,2,年,1,424,5,6,每年消耗品费用总计,US,$,1,758,2026-05-27,非消耗品费用,非消耗品,No,品名,数量,单价,(US,$),单位,使用寿命,总费用,年费用,(US,$),1,燃烧室,1,3,390,EA,3years,3,390,1,130,2,水洗室,1,3,814,EA,3years,3,814,1,271,3,中间法兰,1,1,271,EA,3years,1,271,424,4,加热棒保护管,6,254,EA,3years,1,525,508,5,每年非消耗品费用总计,US,$,3,333,