SECSISECSIIHSMSGEM总结PPT课件.ppt

SEMICim部Cell与Module科 徐宝龙1SEMISEMI:Semiconductor Equipment and Materials International 国际半导体设备与材料产业协会 2SEMI CONTENTSEquipment Automation HardwareEquipment Automation SoftwareFacilitiesFlat Panel DisplayGasesMaterialsMicrolithographyPackagingProcess ChemicalsSafety GuidelinesSilicon Materials&Process ControlTraceabilitySemiconductor3EIS用到标准lSECS:Semiconductor Equipment Communication StandardSECS I(E4)SECS II(E5)GEM(E30)HSMS(E37)4SECS II(E5)GEM(E30)SESC I(E4)HSMS(E37)RS232TCP/IPApplication9600bps10Mbps5SECS I该标准定义了半导体工艺设备（晶片制造，加工，检测，组装，打包设备）和主机之间交换消息通信的接口。该标准包括物理连接器（9-pin or 25-pin），电平信号，传输速率，以及交换消息的逻辑协议。6物理传输单位018 bit9Start BitEnd Bit传输10个bit，0和9是开始和结束信号，1-8bit是数据7逻辑传输单位（Block）Receive EOT1 byteBlock length10254 byteblock2 byteChecksum先传输块的长度，在传输块，最后发送校验码8Block组成10 byte0244 byteHeaderDateDefine in E59SECS I Header组成Upper Device IDSystem ByteSystem ByteLower Device IDUpper Message IDLower Message IDUpper Block No.Lower Block No.System ByteSystem ByteRWE0:Host EQP1:EQP Host0:No reply1:reply 1:last Block10Handshake BytesENQ 5 Request to SendEOT 4 Ready to ReceiveACK 6 Correct ReceptionNAK 21 Incorrect ReceptionHostEQPENQEOTChecksum ACKBlocklength11HSMSHIGH-SPEED SECS MESSAGE SERVICES12HSMS General Message Format4 byte10 byte04GLengthHeaderMessage TextLength=Header Length+Message Text LengthFormat is specified by PType13HSMS Header组成Device IDHeader Byte 2Header Byte 3Ptype=0STypeSystem Byte0-123456-914Header Byte 2-3Ptype=0StreamWFunctionHeader Byte 2Header Byte 3W=1：reply，W=0 No reply15PType(Presentation Type)0 SECS-II Encoding1127 Reserved for subsidiary standards128255 Reserved,not used16SType(Session Type)SType 是一个识别 该消息是HSMS Data Message(value=0)或者其他HSMS Control Messages(other).0 Data Message1 Select.req2 Select.rsp3 Deselect.req4 Deselect.rsp5 Linktest.req 6 Linktest.rsp7 Reject.req8(not used)9 Separate.req10(not used)11127 Reserved for subsidiary standards128255 Reserved,not used17Message HeaderTextMessage TypeBytes 0-1SessionIDByte 2Byte 3Byte 4PtypeByte 5StypeBytes 69 System BytesTextData Message*W-bit SECSStreamSECS Function00Primary:UniqueReply:Same as primaryNoneSelect.req*0001UniqueNoneSelect.rspSame as.req0SelectStatus02Same as.reqNoneDeselect.req*0003UniqueNoneDeselect.rspSame as.req0DeSelectStatus04Same as.reqNoneLinktest.req0 xFFFF0005UniqueNoneLinktest.rsp0 xFFFF0006Same as.reqNoneReject.reqSame MessageReasonCode07Same as message beingrejectedNoneSeparate.req*0009UniqueNone18SelectStatussuccessfullyalready has SelectedConnection Not ReadyConnect Exhaustsubsidiary standard-specificlocal entity-specific reasons01234-127128-25519DeselectStatussuccessfullyCommunication Not EstablishedCommunication Busysubsidiary standard-specificlocal entity-specific reasons0123-127128-255202024/3/6 周三21Reject Reason CodeSType Not SupportedPType Not SupportedTransaction Not OpenEntity Not Selectedsubsidiary standard-specificlocal entity-specific reasons01234-127128-25522HSMS Connection State DiagramNot ConnectionNot SelectedSelectedConnectionT7 Connection Timeout.234517HSMSTCP/IP23Connect ModesActive Mode:获得一个端口发送连接请求等待回复收到ACKConnectedPassive Mode:绑定一个公开的端口等待连接请求发送ACKConnected24SECS IIData StructuresData Item|Variable Item|ObjectDictionaryMessage Detail25Data StructuresNo.of item format code length bytes2item format code 8 7 6 5 4 3 2 1134Length bytesFormat byte0=Illegal,data format error1=One binary length byte(max=255)2=Two binary length bytes(max=64k)3=Three binary length bytes(max=7.99M)26Item Format Codes000000 LIST(length in elements)001000 Binary001001 Boolean010000 ASCII1010001 JIS-8010010 2-byte character2,4011000 8-byte integer(signed)2011001 1-byte integer(signed)011010 2-byte integer(signed)2011100 4-byte integer(signed)2100000 8-byte floating point3100100 4-byte floating point3101000 8-byte integer(unsigned)2101001 1-byte integer(unsigned)101010 2-byte integer(unsigned)2101100 4-byte integer(unsigned)227examplea.binary 10101010.00100001 Item,binary,1 length byte00000001 1 byte long10101010 data byteb.“ABC”01000001 Item ASCII,1 length byte00000011 Three bytes long01000001 ASCII A01000010 ASCII B01000011 ASCII Cc.An item contains three binary numbers in 2-byte signed integer form.01101001 Item,2-byte integers00000010 2 bytes total(2/2=1 integers)xxxxxxxx MSByte number xxxxxxxxx LSByte number x28GEMGENERIC MODEL FOR COMMUNICATIONS AND CONTROL OFMANUFACTURING EQUIPMENT该标准定义了一套通用的设备的动作以及通信功能的标准。该标准定义了一套通用的设备的动作以及通信功能的标准。29TraceReportTerminalservicesMaterialmovementProcessprogramLimitMonitoringspoolingalarmcontrolprocessingcommunicationEquipment30Harel NotationStateOR SubstatesAND Substates31 Transition 状态转换标志 Default entry point 默认进入点h History 历史记录sSelectcConditional selector32Communications State DiagramCommunicationenableDisableCommunicatingNot CommunicatingWait CRWait DelayWait CRApassiveActivecR S1f14R S1f13ECID=233Control State ModelLocalRemoteEquipmentOff-lineHostOff-lineAttemptOn-lineccccOff-lineOn-lineOffline EQP cant communication with Host except S1F13,S1F17 andS2F42.and SxFy reply S*F0.OffLine-OnLine need send S2F17 Date&Time RequestIf PTST LR or UR report ceid 200 203ECID=334Processing State DiagramINITIDLESETUPEXECUTINGREADYPAUSEHProcessing StateSTOPABORTcompletedPAUSEalarmRESUME35Limit State ModelDISABLEDBELOW LIMITNO ZONEABOVE LIMITCENABLED36State Diagram for Alarm ALIDnAlarmClearAlarmSetS5F1 Alarm Report Sent S5F3 Enable/Disable Alarm Send(EAS)S5F103 Current Alarm Set List Request 37transactionTransaction Definition A transaction forms the basis for all information exchanges in SECS-II.A transaction consists of either a primary message for which no reply is requested,or a primary message which requests a reply together with its corresponding secondary message.Secondary messages cannot request a reply.System BytesT3 TimeOut S*F0,S6F1,S9F*no Reply message38conversationA conversation is a series of one or more related transactions used to complete a specific task.Conversation Timeout(S9F13)39Sessionsession a relationship established between two entities for the purpose of exchanging HSMS messages.session ID a 16-bit unsigned integer which identifies a particular session between particular session entities.Session ID=Device ID402024/3/6 周三41