纳米压痕仪与压电力显微镜联用 英文版.pdf

Nanoindentation Based Piezoresponse:Imaging and Strain-induced Modification of Ferroelectric Domainsinduced Modification of Ferroelectric DomainsAlejandro Bonilla,Sebastian Bonilla and Roger ProkschMRS,April 2009gOutlineBackgroundSPM techniques to characterize piezoresponse at the nanoscale:PFM.Piezoelectric Force Microscopy PFM and Piezo Nanoindentation PNIPiezoelectric Force Microscopy PFM and Piezo Nanoindentation PNISNR:Turning up the volumeHow does this transducer work?The Nanoindenter head:Passive transducer.Adapting the transducer to the AFMAdapting the transducer to the AFMContact areas.Lets do all kind of crazy stuff:Piezo Nanoindentation DataPeriodically poled LiNbO3:Scratch experiments.PZT:Hysteresis curves,DART.ySummary and conclusionsMRS,April 2009PiezoResponseCourtesy Stephen Jesse,ORNLVertical PFM Tip shape is importantAmplitude piezo sensitivityPhase polarization direction Tip shape is important Tip motion is importantMRS,April 2009Turn up the volumeFor us,this means a high BW,HV lifi220 V lamplifier up to 220 Volts-Gain of 22-Gain of 22-Need resistive samples-Electrostatic forces can be large-SafetyMRS,April 2009Use the AFM sensors for NanoindentingNanoIndenterNanoIndenterMRS,April 2009PFM nanoindenter True vertical displacementTrue vertical displacement No lateral or torsional crosstalk Large strain:Variety of k values.Complementary technique to SPMComplementary technique to SPM techniques.MRS,April 2009Direct measurement of area functionIndenting tip is placed as ld idsample and imaged with high aspect ratio AFM tip.MRS,April 2009OutlineBackgroundSPM techniques to characterize piezoresponse at the nanoscale:PFM.Piezoelectric Force Microscopy PFM and Piezo Nanoindentation PNIPiezoelectric Force Microscopy PFM and Piezo Nanoindentation PNISNR:Turning up the volumeHow does this transducer work?The Nanoindenter head:Passive transducer.Adapting the transducer to the AFMAdapting the transducer to the AFMContact areas.Lets do all kind of crazy stuff:Piezo Nanoindentation DataPeriodically poled LiNbO3:Scratch experiments.PZT:Hysteresis curves,DART.ySummary and conclusionsMRS,April 2009Contact resonance Variations with stress/strain(Total force)MRS,April 2009PPLN Phase Accurate measurement of phase changeAmplitudePhasePhaseMRS,April 2009Scan range 60umPPLN Phase Accurate measurement of phase changeMRS,April 2009Scratch on PPLNScan range 10um Z range 140 nmScan range 1 6um Z range 120 nmMRS,April 2009Scan range 10um,Z range 140 nmScan range 1.6um,Z range 120 nmHysteresis loops on PZTyMRS,April 2009Hysteresis loops as function of strain500uN1mN1mN2mN5mNMRS,April 2009Summary and Conclusions1AFM based indentation transducer offers1.AFM based indentation transducer offers additional levels of control,sensitivity and data acquisition for PFMdata acquisition for PFM.2Piezo nanoindentation covers the high2.Piezo nanoindentation covers the high strain range of piezo response.3.Strain and stress are easier to quantify(tip characterization).MRS,April 2009AcknowledgementsORNL:ORNL:Sergei Kalinin Stephen JesseStephen JesseMRS,April 2009Position Dependent PFM IndentationMRS,April 2009PZT Large strain-imaged with cantilever PFM fti dtiafter indentingPhase on topographyS25Z120Scan range 10um,Z range 40nmMRS,April 2009Scan range 25um,Z range 120 nmPPLN Phase Accurate measurement of phase changePhAlit dPhaseAmplitudeMRS,April 2009Scan range 60um