PECVD设备简介.ppt

,单击此处编辑母版文本样式,第二级,第三级,第四级,第五级,*,单击此处编辑母版标题样式,PECVD,设备简介,PECVD,全称,PECVD,：,Plasma Enhanced Chemical Vaper Deposition,等离子体增强型化学气相沉积,机台组成,机台由三部分组成,:,Automated cassette load station(ACLS)(optional),（,Port1,、,Port2,、,Port3,、,Port4,）,Mainframe,Remote support system equipment located in a service area outside the clean room,ACLS,The ACLS,是,cleanroom,和,mainframe,的交界,把白玻璃从,cassettes,传送到,mainframe loadlocks,，把完成制程的玻璃从,mainframe,传送回,cassettes,包含,ATM robot controller,和,operator control module,Mainframe,组成,主体,Double Dual Slot Loadlock,（,DDSL,）,Transfer Chamber,（,TC,）,Process Chambers(PC),Gas Panel,控制制程气体流入,process chambers,Mainframe control tower,Houses the mainframe power distribution,（配电箱）,DC power supplies,（直流电供应）,VME,（,VersaModule Eurocard,bus,）,controller,（集成电路板）,Mainframe,Gas Panel,Mainframe Control,Tower,Transfer Chamber,DDSL,Process Chambers,Double Dual Slot Loadlock,Transfer Chamber,View windows,Process Chamber,(RPSC),机台保养（,PM,）,PM,：,Preventative Maintenance,预防性保养,Daily,（日点检）,Weekly,（周保）,Monthly,（月保）,Quarterly,（季保）,Semi-Annual,（半年保）,Annual,（年保）,Daily Preventive Maintenance,点检各,Chamber,冷却水流量，,CDA,、,purge N2,压力，,DI water,（,Deionization Water,去离子水）水位、电阻值等，是否在规格之内,绕机台检查有无泄漏处，查看,Pump Warning message,Weekly Preventive Maintenance,测各,Chamber,的,Leak rate,Base pressure,是否在规格之内,MQC(machine quality control):Thickness,U%,particle,数量,以及量膜边，是否在规格之内,对机台表面的卫生进行清洁，灰尘用,IPA,（,iso-Propyl alcohol,异丙醇）擦拭干净,Monthly Preventive Maintenance,数据备份,马达上油,更换,Pad,Flowcal,检查,Pumping,的,Oil Level,，对于,Oil Level,较低,的添加新的,Oil,Quarterly Preventive Maintenance,清,Scrubber,RF calibration,更换,DI water,及,Filter,Semi-Annual,Preventive Maintenance,PC,开腔，,wet clean,更换,Grounding,更换,PC Lid O-ring,Gas line O-ring,TC Lid O-ring,Spacing calibration,Annual Preventive Maintenance,机台断电，解决各种问题,更换,Pumping Line Exhaust Filter,清理,Chamber,内部的,Particle,对,Pump,进行检修维护,THE END,THANKS,